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Semiconductor production process and testing process temperature control equipment

Use fluid fluorinated liquid for temperature control (minimum -100 degrees)
Gas cold and hot rapid temperature change thermal chuck
Low temperature gas cooler -120 degrees
Direct cooling cooling unit (-150 degrees)
The heating method within 40°C is heated by compressor hot air.
The Chiller ring system adopts a fully enclosed design and a magnetic drive pump.
Chiller100% helium detection, 100% safety inspection, to ensure safety and reliability.
chiller100% after 24 hours of continuous operation copy machine.

コンデンサー： micro-channel heat exchanger (air-cooled) plate heat exchanger (water-cooled)
蒸発器： Plate heat exchanger Throttling device: Electronic expansion valve Circulation system: The whole system is a fully closed system, low temperature does not absorb moisture in the air, does not volatilize heat transfer medium, low temperature automatically replenishes heat transfer medium into the circulation system.
Shell material: cold-rolled plate spray RAL7035
Inside the pipeline: including stainless steel SUS304, copper, ceramics, broken silicon, silicone sealant, PTFE

制御システム： PLC programmable controller
Communication protocol: RS485 interface Modbus RTU protocol
イーサネット・インターフェース TCP/IPプロトコル
Operation interface: LNEYA customized 7-inch color touch factory temperature curve display\EXCEL data export

可変周波数ポンプは、循環油圧圧力と流量を調整することができます。

The output pressure and flow rate of circulating fluid can be set on the operation panel. Even under various customer piping conditions, without bypass piping adjustment, the output pressure can be automatically controlled at the set output pressure through the frequency conversion pump. Thereby, the power consumption of a pump can be reduced. Depending on the flow rate, bypass piping may be required

Circulation heating is possible without a heater because it is heated by the exhausted heat