{"id":14520,"date":"2025-07-04T09:36:45","date_gmt":"2025-07-04T01:36:45","guid":{"rendered":"https:\/\/www.lneya.com\/?p=14520"},"modified":"2025-12-03T16:24:42","modified_gmt":"2025-12-03T08:24:42","slug":"semiconductor-chiller-applications-in-modern-wafer-fabrication","status":"publish","type":"post","link":"https:\/\/tw.lneya.com\/ja\/blog\/semiconductor-chiller-applications-in-modern-wafer-fabrication.html","title":{"rendered":"\u6700\u65b0\u306e\u30a6\u30a7\u30cf\u30fc\u88fd\u9020\u306b\u304a\u3051\u308b\u534a\u5c0e\u4f53\u30c1\u30e9\u30fc\u306e\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3"},"content":{"rendered":"<style>.wp-block-kadence-advancedheading.kt-adv-heading14520_9d6934-e8, .wp-block-kadence-advancedheading.kt-adv-heading14520_9d6934-e8[data-kb-block=\"kb-adv-heading14520_9d6934-e8\"]{text-align:center;font-size:36px;font-style:normal;font-family:Arial, Helvetica, sans-serif;letter-spacing:0.2px;}.wp-block-kadence-advancedheading.kt-adv-heading14520_9d6934-e8 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading14520_9d6934-e8[data-kb-block=\"kb-adv-heading14520_9d6934-e8\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading14520_9d6934-e8 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading14520_9d6934-e8[data-kb-block=\"kb-adv-heading14520_9d6934-e8\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<h1 class=\"kt-adv-heading14520_9d6934-e8 wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading14520_9d6934-e8\">Semiconductor Chiller Applications in Modern Wafer fabrication<\/h1>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading14520_4dca8f-81, .wp-block-kadence-advancedheading.kt-adv-heading14520_4dca8f-81[data-kb-block=\"kb-adv-heading14520_4dca8f-81\"]{font-size:18px;font-weight:400;font-style:normal;font-family:Arial, Helvetica, sans-serif;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading14520_4dca8f-81 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading14520_4dca8f-81[data-kb-block=\"kb-adv-heading14520_4dca8f-81\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading14520_4dca8f-81 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading14520_4dca8f-81[data-kb-block=\"kb-adv-heading14520_4dca8f-81\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading14520_4dca8f-81 wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading14520_4dca8f-81\">Wafers are the core material for manufacturing semiconductor chips. They are generally round, thin sheets made of high-purity silicon. Transistors, capacitors, resistors, and multi-layer interconnect structures are constructed on their surfaces through processes such as photolithography, etching, and thin film deposition. Therefore, the quality of the wafer directly determines the performance of the chip.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading14520_7546bd-56, .wp-block-kadence-advancedheading.kt-adv-heading14520_7546bd-56[data-kb-block=\"kb-adv-heading14520_7546bd-56\"]{font-size:18px;font-weight:400;font-style:normal;font-family:Arial, Helvetica, sans-serif;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading14520_7546bd-56 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading14520_7546bd-56[data-kb-block=\"kb-adv-heading14520_7546bd-56\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading14520_7546bd-56 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading14520_7546bd-56[data-kb-block=\"kb-adv-heading14520_7546bd-56\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading14520_7546bd-56 wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading14520_7546bd-56\">Wafer processing is susceptible to temperature. Temperature fluctuations will affect the etching depth, photoresist development effect, and film stress distribution, thereby affecting the consistency of the microstructure. Therefore, the wafer fabrication\u00a0must be equipped with a high-precision, fast-response, and long-term stable temperature control system. High-precision temperature control is essential equipment for the wafer fabrication.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"360\" height=\"315\" src=\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/3-1.jpg\" alt=\"\" class=\"wp-image-12539\" srcset=\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/3-1.jpg 360w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/3-1-300x263.jpg 300w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/3-1-14x12.jpg 14w\" sizes=\"auto, (max-width: 360px) 100vw, 360px\" \/><\/figure>\n<\/div>\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading14520_b572de-77, .wp-block-kadence-advancedheading.kt-adv-heading14520_b572de-77[data-kb-block=\"kb-adv-heading14520_b572de-77\"]{font-size:30px;font-weight:400;font-style:normal;font-family:Arial, Helvetica, sans-serif;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading14520_b572de-77 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading14520_b572de-77[data-kb-block=\"kb-adv-heading14520_b572de-77\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading14520_b572de-77 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading14520_b572de-77[data-kb-block=\"kb-adv-heading14520_b572de-77\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<h2 class=\"kt-adv-heading14520_b572de-77 wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading14520_b572de-77\"><strong>Key Processes Using Semiconductor Chillers<\/strong><\/h2>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading14520_55f64e-62, .wp-block-kadence-advancedheading.kt-adv-heading14520_55f64e-62[data-kb-block=\"kb-adv-heading14520_55f64e-62\"]{font-size:22px;font-weight:400;font-style:normal;font-family:Arial, Helvetica, sans-serif;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading14520_55f64e-62 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading14520_55f64e-62[data-kb-block=\"kb-adv-heading14520_55f64e-62\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading14520_55f64e-62 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading14520_55f64e-62[data-kb-block=\"kb-adv-heading14520_55f64e-62\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<h3 class=\"kt-adv-heading14520_55f64e-62 wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading14520_55f64e-62\"><strong>Photolithography<\/strong><\/h3>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading14520_96bd93-be, .wp-block-kadence-advancedheading.kt-adv-heading14520_96bd93-be[data-kb-block=\"kb-adv-heading14520_96bd93-be\"]{font-size:18px;font-weight:400;font-style:normal;font-family:Arial, Helvetica, sans-serif;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading14520_96bd93-be mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading14520_96bd93-be[data-kb-block=\"kb-adv-heading14520_96bd93-be\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading14520_96bd93-be img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading14520_96bd93-be[data-kb-block=\"kb-adv-heading14520_96bd93-be\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading14520_96bd93-be wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading14520_96bd93-be\">Photolithography is a micro-pattern transfer technology that &#8220;prints&#8221; circuit patterns onto the surface of the wafer. Its process accuracy determines the integration and performance of the chip. The specific steps are to evenly spin-coat the photoresist on the wafer, expose it through a mask, expose a specific area to light, then use a developer to show the pattern, and finally solidify and dry it.<br>\u00a0<br>Chillers can control the temperature of the light source of the exposure machine, the process chamber of the spin coater, and the cooling plate of the developer. This prevents photoresist degradation and alignment errors caused by localized thermal expansion of the wafer. It can also provide cooling water for high-precision laser positioning systems.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading14520_c26a25-5d, .wp-block-kadence-advancedheading.kt-adv-heading14520_c26a25-5d[data-kb-block=\"kb-adv-heading14520_c26a25-5d\"]{font-size:22px;font-weight:400;font-style:normal;font-family:Arial, Helvetica, sans-serif;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading14520_c26a25-5d mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading14520_c26a25-5d[data-kb-block=\"kb-adv-heading14520_c26a25-5d\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading14520_c26a25-5d img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading14520_c26a25-5d[data-kb-block=\"kb-adv-heading14520_c26a25-5d\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<h3 class=\"kt-adv-heading14520_c26a25-5d wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading14520_c26a25-5d\"><strong>Dry Etching<\/strong><\/h3>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading14520_f6956b-9e, .wp-block-kadence-advancedheading.kt-adv-heading14520_f6956b-9e[data-kb-block=\"kb-adv-heading14520_f6956b-9e\"]{font-size:18px;font-weight:400;font-style:normal;font-family:Arial, Helvetica, sans-serif;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading14520_f6956b-9e mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading14520_f6956b-9e[data-kb-block=\"kb-adv-heading14520_f6956b-9e\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading14520_f6956b-9e img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading14520_f6956b-9e[data-kb-block=\"kb-adv-heading14520_f6956b-9e\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading14520_f6956b-9e wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading14520_f6956b-9e\">Dry etching is divided into reactive ion etching (RIE) and inductively coupled plasma etching (ICP). Use plasma or reactive gas to engrave the pattern formed by lithography into the material layer. In this process, the chiller is used to cool the reaction chamber, control the temperature of the electrode platform, and protect the vacuum pump system and plasma source. Its temperature control stability directly affects the verticality and uniformity of the etched pattern.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading14520_265e60-a7, .wp-block-kadence-advancedheading.kt-adv-heading14520_265e60-a7[data-kb-block=\"kb-adv-heading14520_265e60-a7\"]{font-size:22px;font-weight:400;font-style:normal;font-family:Arial, Helvetica, sans-serif;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading14520_265e60-a7 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading14520_265e60-a7[data-kb-block=\"kb-adv-heading14520_265e60-a7\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading14520_265e60-a7 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading14520_265e60-a7[data-kb-block=\"kb-adv-heading14520_265e60-a7\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<h3 class=\"kt-adv-heading14520_265e60-a7 wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading14520_265e60-a7\"><strong>Thin Film Deposition<\/strong><\/h3>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading14520_732aa5-12, .wp-block-kadence-advancedheading.kt-adv-heading14520_732aa5-12[data-kb-block=\"kb-adv-heading14520_732aa5-12\"]{font-size:18px;font-weight:400;font-style:normal;font-family:Arial, Helvetica, sans-serif;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading14520_732aa5-12 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading14520_732aa5-12[data-kb-block=\"kb-adv-heading14520_732aa5-12\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading14520_732aa5-12 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading14520_732aa5-12[data-kb-block=\"kb-adv-heading14520_732aa5-12\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading14520_732aa5-12 wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading14520_732aa5-12\">Deposition is the formation of an insulating layer, a conductive layer, or a barrier layer on the wafer. It is mainly achieved through physical vapor deposition (PVD), chemical vapor deposition (CVD), and atomic layer deposition (ALD). The chiller can control the temperature of the deposition reaction chamber, cool down the target, coil, cooling plate, and other parts, and avoid fluctuations in film thickness and the generation of particles. Among them, the ALD process requires higher temperature control accuracy, and dynamic temperature control can only be achieved with the help of a chiller.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading14520_19a993-d8, .wp-block-kadence-advancedheading.kt-adv-heading14520_19a993-d8[data-kb-block=\"kb-adv-heading14520_19a993-d8\"]{font-size:22px;font-weight:400;font-style:normal;font-family:Arial, Helvetica, sans-serif;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading14520_19a993-d8 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading14520_19a993-d8[data-kb-block=\"kb-adv-heading14520_19a993-d8\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading14520_19a993-d8 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading14520_19a993-d8[data-kb-block=\"kb-adv-heading14520_19a993-d8\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<h3 class=\"kt-adv-heading14520_19a993-d8 wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading14520_19a993-d8\"><strong>Polishing process<\/strong><\/h3>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading14520_e10a01-dd, .wp-block-kadence-advancedheading.kt-adv-heading14520_e10a01-dd[data-kb-block=\"kb-adv-heading14520_e10a01-dd\"]{font-size:18px;font-weight:400;font-style:normal;font-family:Arial, Helvetica, sans-serif;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading14520_e10a01-dd mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading14520_e10a01-dd[data-kb-block=\"kb-adv-heading14520_e10a01-dd\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading14520_e10a01-dd img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading14520_e10a01-dd[data-kb-block=\"kb-adv-heading14520_e10a01-dd\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading14520_e10a01-dd wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading14520_e10a01-dd\">Chemical mechanical polishing (CMP) is a process of polishing the wafer surface to achieve global flatness under the combined action of chemical corrosion and mechanical friction. This is a necessary step before multi-layer interconnect metal wiring. The circulation of the polishing slurry and the friction between the polishing pad and wafer generate significant heat. Failure to remove waste heat in time will cause thermal expansion of the polishing disc, affecting the flatness of the wafer surface. This requires a chiller to cool the polishing disc in time, control the temperature of the polishing liquid, and provide constant temperature pure water for the cleaning equipment after polishing.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading14520_7771c7-e8, .wp-block-kadence-advancedheading.kt-adv-heading14520_7771c7-e8[data-kb-block=\"kb-adv-heading14520_7771c7-e8\"]{font-size:22px;font-weight:400;font-style:normal;font-family:Arial, Helvetica, sans-serif;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading14520_7771c7-e8 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading14520_7771c7-e8[data-kb-block=\"kb-adv-heading14520_7771c7-e8\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading14520_7771c7-e8 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading14520_7771c7-e8[data-kb-block=\"kb-adv-heading14520_7771c7-e8\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<h3 class=\"kt-adv-heading14520_7771c7-e8 wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading14520_7771c7-e8\"><strong>Inspection and testing<\/strong><\/h3>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading14520_ac7134-51, .wp-block-kadence-advancedheading.kt-adv-heading14520_ac7134-51[data-kb-block=\"kb-adv-heading14520_ac7134-51\"]{font-size:18px;font-weight:400;font-style:normal;font-family:Arial, Helvetica, sans-serif;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading14520_ac7134-51 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading14520_ac7134-51[data-kb-block=\"kb-adv-heading14520_ac7134-51\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading14520_ac7134-51 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading14520_ac7134-51[data-kb-block=\"kb-adv-heading14520_ac7134-51\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading14520_ac7134-51 wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading14520_ac7134-51\">After each process stage, defects and electrical properties must be detected through tests such as AOI automatic optical inspection, E-beam electron beam inspection, and electrical probe testing. The chiller helps cool the AOI lens, electrical probe seat, CCD, and laser scanning module to avoid image drift or error caused by equipment temperature rise.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"360\" height=\"315\" src=\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/2-1.jpg\" alt=\"\" class=\"wp-image-12538\" srcset=\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/2-1.jpg 360w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/2-1-300x263.jpg 300w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/2-1-14x12.jpg 14w\" sizes=\"auto, (max-width: 360px) 100vw, 360px\" \/><\/figure>\n<\/div>\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading14520_4da05a-19, .wp-block-kadence-advancedheading.kt-adv-heading14520_4da05a-19[data-kb-block=\"kb-adv-heading14520_4da05a-19\"]{font-size:30px;font-weight:400;font-style:normal;font-family:Arial, Helvetica, sans-serif;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading14520_4da05a-19 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading14520_4da05a-19[data-kb-block=\"kb-adv-heading14520_4da05a-19\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading14520_4da05a-19 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading14520_4da05a-19[data-kb-block=\"kb-adv-heading14520_4da05a-19\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<h2 class=\"kt-adv-heading14520_4da05a-19 wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading14520_4da05a-19\"><strong>Wafer fabrication\u00a0requirements for chillers<\/strong><\/h2>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading14520_136a7a-67, .wp-block-kadence-advancedheading.kt-adv-heading14520_136a7a-67[data-kb-block=\"kb-adv-heading14520_136a7a-67\"]{font-size:18px;font-weight:400;font-style:normal;font-family:Arial, Helvetica, sans-serif;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading14520_136a7a-67 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading14520_136a7a-67[data-kb-block=\"kb-adv-heading14520_136a7a-67\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading14520_136a7a-67 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading14520_136a7a-67[data-kb-block=\"kb-adv-heading14520_136a7a-67\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading14520_136a7a-67 wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading14520_136a7a-67\">The wafer fabrication&#8217;s requirements for chillers cover multiple aspects such as accuracy, stability, cleanliness, and response speed.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading14520_28e2c8-c3, .wp-block-kadence-advancedheading.kt-adv-heading14520_28e2c8-c3[data-kb-block=\"kb-adv-heading14520_28e2c8-c3\"]{font-size:22px;font-weight:400;font-style:normal;font-family:Arial, Helvetica, sans-serif;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading14520_28e2c8-c3 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading14520_28e2c8-c3[data-kb-block=\"kb-adv-heading14520_28e2c8-c3\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading14520_28e2c8-c3 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading14520_28e2c8-c3[data-kb-block=\"kb-adv-heading14520_28e2c8-c3\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<h3 class=\"kt-adv-heading14520_28e2c8-c3 wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading14520_28e2c8-c3\"><strong>Temperature control accuracy<\/strong><\/h3>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading14520_d01ab9-18, .wp-block-kadence-advancedheading.kt-adv-heading14520_d01ab9-18[data-kb-block=\"kb-adv-heading14520_d01ab9-18\"]{font-size:18px;font-weight:400;font-style:normal;font-family:Arial, Helvetica, sans-serif;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading14520_d01ab9-18 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading14520_d01ab9-18[data-kb-block=\"kb-adv-heading14520_d01ab9-18\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading14520_d01ab9-18 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading14520_d01ab9-18[data-kb-block=\"kb-adv-heading14520_d01ab9-18\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading14520_d01ab9-18 wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading14520_d01ab9-18\">In processes such as lithography, etching, and thin film deposition, any slight temperature difference may cause line width changes, uneven film thickness, or differences in etching depth, affecting chip performance. Certain critical processes demand temperature precision of \u00b10.05\u2103 or even \u00b10.02\u2103.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading14520_1f7efb-2e, .wp-block-kadence-advancedheading.kt-adv-heading14520_1f7efb-2e[data-kb-block=\"kb-adv-heading14520_1f7efb-2e\"]{font-size:22px;font-weight:400;font-style:normal;font-family:Arial, Helvetica, sans-serif;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading14520_1f7efb-2e mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading14520_1f7efb-2e[data-kb-block=\"kb-adv-heading14520_1f7efb-2e\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading14520_1f7efb-2e img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading14520_1f7efb-2e[data-kb-block=\"kb-adv-heading14520_1f7efb-2e\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<h3 class=\"kt-adv-heading14520_1f7efb-2e wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading14520_1f7efb-2e\"><strong>Response speed<\/strong><\/h3>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading14520_edab98-9b, .wp-block-kadence-advancedheading.kt-adv-heading14520_edab98-9b[data-kb-block=\"kb-adv-heading14520_edab98-9b\"]{font-size:18px;font-weight:400;font-style:normal;font-family:Arial, Helvetica, sans-serif;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading14520_edab98-9b mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading14520_edab98-9b[data-kb-block=\"kb-adv-heading14520_edab98-9b\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading14520_edab98-9b img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading14520_edab98-9b[data-kb-block=\"kb-adv-heading14520_edab98-9b\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading14520_edab98-9b wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading14520_edab98-9b\">Process switching is relatively frequent in wafer manufacturing, and the chiller must be able to quickly adjust the temperature to prevent production delays. The chiller is required to quickly reach the set temperature and operate stably after startup. The heating or cooling rate should reach at least 5\u2103\/min. Even if there is a temperature disturbance, it must be able to quickly return to the set value.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading14520_62a98b-55, .wp-block-kadence-advancedheading.kt-adv-heading14520_62a98b-55[data-kb-block=\"kb-adv-heading14520_62a98b-55\"]{font-size:22px;font-weight:400;font-style:normal;font-family:Arial, Helvetica, sans-serif;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading14520_62a98b-55 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading14520_62a98b-55[data-kb-block=\"kb-adv-heading14520_62a98b-55\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading14520_62a98b-55 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading14520_62a98b-55[data-kb-block=\"kb-adv-heading14520_62a98b-55\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<h3 class=\"kt-adv-heading14520_62a98b-55 wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading14520_62a98b-55\"><strong>Cleanliness<\/strong><\/h3>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading14520_a65cce-fb, .wp-block-kadence-advancedheading.kt-adv-heading14520_a65cce-fb[data-kb-block=\"kb-adv-heading14520_a65cce-fb\"]{font-size:18px;font-weight:400;font-style:normal;font-family:Arial, Helvetica, sans-serif;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading14520_a65cce-fb mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading14520_a65cce-fb[data-kb-block=\"kb-adv-heading14520_a65cce-fb\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading14520_a65cce-fb img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading14520_a65cce-fb[data-kb-block=\"kb-adv-heading14520_a65cce-fb\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading14520_a65cce-fb wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading14520_a65cce-fb\">The core workshop of the wafer fabrication\u00a0is an advanced clean room, and even tiny impurities may be brought into the process, causing wafer contamination. Therefore, the chiller should use ultrapure water with a resistivity of > 10 M\u03a9\u00b7cm as cooling water to prevent ionic impurities from entering the cavity. The material used for the pipeline cannot have metal precipitation.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading14520_ac6833-65, .wp-block-kadence-advancedheading.kt-adv-heading14520_ac6833-65[data-kb-block=\"kb-adv-heading14520_ac6833-65\"]{font-size:22px;font-weight:400;font-style:normal;font-family:Arial, Helvetica, sans-serif;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading14520_ac6833-65 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading14520_ac6833-65[data-kb-block=\"kb-adv-heading14520_ac6833-65\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading14520_ac6833-65 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading14520_ac6833-65[data-kb-block=\"kb-adv-heading14520_ac6833-65\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<h3 class=\"kt-adv-heading14520_ac6833-65 wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading14520_ac6833-65\"><strong>Stability<\/strong><\/h3>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading14520_190340-43, .wp-block-kadence-advancedheading.kt-adv-heading14520_190340-43[data-kb-block=\"kb-adv-heading14520_190340-43\"]{font-size:18px;font-weight:400;font-style:normal;font-family:Arial, Helvetica, sans-serif;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading14520_190340-43 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading14520_190340-43[data-kb-block=\"kb-adv-heading14520_190340-43\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading14520_190340-43 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading14520_190340-43[data-kb-block=\"kb-adv-heading14520_190340-43\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading14520_190340-43 wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading14520_190340-43\">The wafer fabrication\u00a0is usually open all year round. The equipment operation cost is high, and any failure of the chiller may cause batch defective products. The continuous operation time of the chiller is required to be greater than 20,000 hours, and it is equipped with dual pumps, dual circuits, or N+1 redundant design. It should support remote alarms, system self-diagnosis, automatic switchover, and other intelligent functions.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading14520_7f8d2d-52, .wp-block-kadence-advancedheading.kt-adv-heading14520_7f8d2d-52[data-kb-block=\"kb-adv-heading14520_7f8d2d-52\"]{font-size:22px;font-weight:400;font-style:normal;font-family:Arial, Helvetica, sans-serif;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading14520_7f8d2d-52 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading14520_7f8d2d-52[data-kb-block=\"kb-adv-heading14520_7f8d2d-52\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading14520_7f8d2d-52 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading14520_7f8d2d-52[data-kb-block=\"kb-adv-heading14520_7f8d2d-52\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<h3 class=\"kt-adv-heading14520_7f8d2d-52 wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading14520_7f8d2d-52\"><strong>Zoned temperature control<\/strong><\/h3>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading14520_793793-c7, .wp-block-kadence-advancedheading.kt-adv-heading14520_793793-c7[data-kb-block=\"kb-adv-heading14520_793793-c7\"]{font-size:18px;font-weight:400;font-style:normal;font-family:Arial, Helvetica, sans-serif;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading14520_793793-c7 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading14520_793793-c7[data-kb-block=\"kb-adv-heading14520_793793-c7\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading14520_793793-c7 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading14520_793793-c7[data-kb-block=\"kb-adv-heading14520_793793-c7\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading14520_793793-c7 wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading14520_793793-c7\">There may be different process zones on a device, such as the heating zone and cooling zone, and coolants of different temperatures are required at the same time. This scenario generally uses a <a href=\"https:\/\/tw.lneya.com\/multi-channel-chillers\">multi-channel chiller<\/a> that can independently control the parameters of each flow channel. Each zone\u2019s temperature, pressure, and flow rate can be set independently.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full is-resized\"><img loading=\"lazy\" decoding=\"async\" width=\"616\" height=\"612\" src=\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/05\/FLTZ-TRIPLE-CHANNEL-CHILLER-e1748483706888.png\" alt=\"\" class=\"wp-image-13913\" style=\"width:376px;height:auto\" srcset=\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/05\/FLTZ-TRIPLE-CHANNEL-CHILLER-e1748483706888.png 616w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/05\/FLTZ-TRIPLE-CHANNEL-CHILLER-e1748483706888-300x298.png 300w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/05\/FLTZ-TRIPLE-CHANNEL-CHILLER-e1748483706888-150x150.png 150w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/05\/FLTZ-TRIPLE-CHANNEL-CHILLER-e1748483706888-12x12.png 12w\" sizes=\"auto, (max-width: 616px) 100vw, 616px\" \/><\/figure>\n<\/div>\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading14520_893e48-c9, .wp-block-kadence-advancedheading.kt-adv-heading14520_893e48-c9[data-kb-block=\"kb-adv-heading14520_893e48-c9\"]{font-size:22px;font-weight:400;font-style:normal;font-family:Arial, Helvetica, sans-serif;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading14520_893e48-c9 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading14520_893e48-c9[data-kb-block=\"kb-adv-heading14520_893e48-c9\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading14520_893e48-c9 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading14520_893e48-c9[data-kb-block=\"kb-adv-heading14520_893e48-c9\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<h3 class=\"kt-adv-heading14520_893e48-c9 wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading14520_893e48-c9\"><strong>Safety<\/strong><\/h3>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading14520_0d6a8d-55, .wp-block-kadence-advancedheading.kt-adv-heading14520_0d6a8d-55[data-kb-block=\"kb-adv-heading14520_0d6a8d-55\"]{font-size:18px;font-weight:400;font-style:normal;font-family:Arial, Helvetica, sans-serif;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading14520_0d6a8d-55 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading14520_0d6a8d-55[data-kb-block=\"kb-adv-heading14520_0d6a8d-55\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading14520_0d6a8d-55 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading14520_0d6a8d-55[data-kb-block=\"kb-adv-heading14520_0d6a8d-55\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading14520_0d6a8d-55 wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading14520_0d6a8d-55\">The process liquids used in wafer manufacturing may have characteristics such as flammable, toxic, or corrosive. Chiller\u00a0units need to pass international certifications such as CE, UL, SEMI S2\/S8, RoHS, etc. The electrical, refrigerant circuit, pump body, etc. should meet the explosion-proof requirements. The system should also be equipped with various safety devices.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading14520_3b1b10-dc, .wp-block-kadence-advancedheading.kt-adv-heading14520_3b1b10-dc[data-kb-block=\"kb-adv-heading14520_3b1b10-dc\"]{font-size:30px;font-weight:400;font-style:normal;font-family:Arial, Helvetica, sans-serif;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading14520_3b1b10-dc mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading14520_3b1b10-dc[data-kb-block=\"kb-adv-heading14520_3b1b10-dc\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading14520_3b1b10-dc img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading14520_3b1b10-dc[data-kb-block=\"kb-adv-heading14520_3b1b10-dc\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<h2 class=\"kt-adv-heading14520_3b1b10-dc wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading14520_3b1b10-dc\"><strong>LNEYA Semiconductor Chiller<\/strong><\/h2>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading14520_3655d9-7d, .wp-block-kadence-advancedheading.kt-adv-heading14520_3655d9-7d[data-kb-block=\"kb-adv-heading14520_3655d9-7d\"]{font-size:18px;font-weight:400;font-style:normal;font-family:Arial, Helvetica, sans-serif;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading14520_3655d9-7d mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading14520_3655d9-7d[data-kb-block=\"kb-adv-heading14520_3655d9-7d\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading14520_3655d9-7d img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading14520_3655d9-7d[data-kb-block=\"kb-adv-heading14520_3655d9-7d\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading14520_3655d9-7d wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading14520_3655d9-7d\">LNEYA is a Chinese chiller manufacturer focusing on the research and development of high-end temperature control equipment. Its products are widely used in wafer manufacturing, packaging and testing, laser, chip packaging, and other links.<br>\u00a0<br>We provide customized chiller solutions with a controllable temperature range of <strong>-150\u2103 to +350\u2103<\/strong> and a temperature control accuracy of up to <strong>\u00b10.02\u2103<\/strong>, with flexible configurations including multi-channel control, <a href=\"https:\/\/tw.lneya.com\/air-cooled-chillers\">air-cooled<\/a> or <a href=\"https:\/\/tw.lneya.com\/water-cooled-chillers\">water-cooled<\/a> options, <a href=\"https:\/\/tw.lneya.com\/explosion-proof-chiller\">explosion-proof<\/a> designs, and more.<br>\u00a0<br><a href=\"https:\/\/tw.lneya.com\/contact\">Discuss your wafer temperature control needs with LNEYA chiller experts.<\/a><\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading14520_c5a6c8-78, .wp-block-kadence-advancedheading.kt-adv-heading14520_c5a6c8-78[data-kb-block=\"kb-adv-heading14520_c5a6c8-78\"]{text-align:center;font-size:30px;font-weight:400;font-style:normal;font-family:Arial, Helvetica, sans-serif;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading14520_c5a6c8-78 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading14520_c5a6c8-78[data-kb-block=\"kb-adv-heading14520_c5a6c8-78\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading14520_c5a6c8-78 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading14520_c5a6c8-78[data-kb-block=\"kb-adv-heading14520_c5a6c8-78\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<h2 class=\"kt-adv-heading14520_c5a6c8-78 wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading14520_c5a6c8-78\"><strong>Related chillers<\/strong><\/h2>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedgallery.kb-gallery-wrap-id-14520_091e5d-f4{margin-top:0px;padding-top:0px;}.kb-gallery-id-14520_091e5d-f4.kb-gallery-ul.kb-gallery-type-fluidcarousel .kt-blocks-carousel figure .kb-gal-image-radius, .kb-gallery-id-14520_091e5d-f4.kb-gallery-ul.kb-gallery-type-fluidcarousel .kt-blocks-carousel figure .kb-gal-image-radius img{height:300px;}.kb-gallery-id-14520_091e5d-f4 .kadence-blocks-gallery-item .kb-gal-image-radius, .kb-gallery-id-14520_091e5d-f4 .kb-slide-item .kb-gal-image-radius img{border-radius:0px 0px 0px 0px;;}.kb-gallery-id-14520_091e5d-f4 .kadence-blocks-gallery-item .kadence-blocks-gallery-item-inner .kadence-blocks-gallery-item__caption{font-size:20px;font-family:Arial, Helvetica, sans-serif;font-weight:400;text-transform:capitalize;color:#ffffff;}.kb-gallery-caption-style-cover-hover.kb-gallery-id-14520_091e5d-f4 .kadence-blocks-gallery-item .kadence-blocks-gallery-item-inner .kadence-blocks-gallery-item__caption, .kb-gallery-caption-style-below.kb-gallery-id-14520_091e5d-f4 .kadence-blocks-gallery-item .kadence-blocks-gallery-item-inner .kadence-blocks-gallery-item__caption{background:#014391;}.kb-gallery-wrap-id-14520_091e5d-f4.wp-block-kadence-advancedgallery{overflow:visible;}.kb-gallery-wrap-id-14520_091e5d-f4.wp-block-kadence-advancedgallery .kt-blocks-carousel{overflow:visible;max-width:100%;}<\/style><div class=\"kb-gallery-wrap-id-14520_091e5d-f4 alignnone wp-block-kadence-advancedgallery\"><div class=\"kb-gallery-ul kb-gallery-non-static kb-gallery-type-fluidcarousel kb-gallery-id-14520_091e5d-f4 kb-gallery-caption-style-below kb-gallery-filter-none\" data-image-filter=\"none\" data-lightbox-caption=\"true\"><div class=\"kt-blocks-carousel splide kt-carousel-container-dotstyle-dark kt-carousel-arrowstyle-whiteondark kt-carousel-dotstyle-dark kb-slider-group-arrow kb-slider-arrow-position-center\" data-slider-anim-speed=\"400\" data-slider-scroll=\"1\" data-slider-arrows=\"true\" data-slider-dots=\"true\" data-slider-hover-pause=\"false\" data-slider-auto=\"\" data-slider-speed=\"7000\" data-slider-type=\"fluidcarousel\" data-slider-center-mode=\"true\" data-slider-gap=\"38px\" data-slider-gap-tablet=\"38px\" data-slider-gap-mobile=\"38px\" data-show-pause-button=\"false\"><div class=\"splide__track\"><ul class=\"kt-blocks-carousel-init kb-blocks-fluid-carousel splide__list\"><li class=\"kb-slide-item kb-gallery-carousel-item splide__slide\"><div class=\"kadence-blocks-gallery-item\"><div class=\"kadence-blocks-gallery-item-inner\"><figure class=\"kb-gallery-figure kb-gallery-item-has-link kadence-blocks-gallery-item-has-caption\"><a href=\"https:\/\/tw.lneya.com\/industrial-chiller\/mini-chiller.html\" class=\"kb-gallery-item-link\"  ><div class=\"kb-gal-image-radius\"><div class=\"kb-gallery-image-contain\" ><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/05\/FLTZ-SINGLE-CHANNEL-CHILLER-e1749711591853.png\" width=\"450\" height=\"496\" alt=\"water cooled chiller\" data-full-image=\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/05\/FLTZ-SINGLE-CHANNEL-CHILLER-e1749711591853.png\" data-light-image=\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/05\/FLTZ-SINGLE-CHANNEL-CHILLER-e1749711591853.png\" data-id=\"13911\" class=\"wp-image-13911 skip-lazy\"\/><\/div><\/div><div class=\"kadence-blocks-gallery-item__caption\">Mini chiller<\/div><\/a><\/figure><\/div><\/div><\/li><li class=\"kb-slide-item kb-gallery-carousel-item splide__slide\"><div class=\"kadence-blocks-gallery-item\"><div class=\"kadence-blocks-gallery-item-inner\"><figure class=\"kb-gallery-figure kb-gallery-item-has-link kadence-blocks-gallery-item-has-caption\"><a href=\"https:\/\/tw.lneya.com\/catalog\/dual-chiller.html\" class=\"kb-gallery-item-link\" target=\"_blank\" rel=\"noopener noreferrer\"><div class=\"kb-gal-image-radius\"><div class=\"kb-gallery-image-contain\" ><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/KRY\u53d8\u9891-2.png\" width=\"870\" height=\"630\" alt=\"\" data-full-image=\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/KRY\u53d8\u9891-2.png\" data-light-image=\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/KRY\u53d8\u9891-2.png\" data-id=\"13315\" class=\"wp-image-13315 skip-lazy\" srcset=\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/KRY\u53d8\u9891-2.png 870w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/KRY\u53d8\u9891-2-300x217.png 300w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/KRY\u53d8\u9891-2-768x556.png 768w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/KRY\u53d8\u9891-2-18x12.png 18w\" sizes=\"auto, (max-width: 870px) 100vw, 870px\" \/><\/div><\/div><div class=\"kadence-blocks-gallery-item__caption\">dual chiller<\/div><\/a><\/figure><\/div><\/div><\/li><li class=\"kb-slide-item kb-gallery-carousel-item splide__slide\"><div class=\"kadence-blocks-gallery-item\"><div class=\"kadence-blocks-gallery-item-inner\"><figure class=\"kb-gallery-figure kb-gallery-item-has-link kadence-blocks-gallery-item-has-caption\"><a href=\"https:\/\/tw.lneya.com\/thermal-chuck\" class=\"kb-gallery-item-link\" target=\"_blank\" rel=\"noopener noreferrer\"><div class=\"kb-gal-image-radius\"><div class=\"kb-gallery-image-contain\" ><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/AI.png\" width=\"870\" height=\"630\" alt=\"\" data-full-image=\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/AI.png\" data-light-image=\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/AI.png\" data-id=\"13309\" class=\"wp-image-13309 skip-lazy\" srcset=\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/AI.png 870w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/AI-300x217.png 300w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/AI-768x556.png 768w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/AI-18x12.png 18w\" sizes=\"auto, (max-width: 870px) 100vw, 870px\" \/><\/div><\/div><div class=\"kadence-blocks-gallery-item__caption\">AI thermal chuck<\/div><\/a><\/figure><\/div><\/div><\/li><li class=\"kb-slide-item kb-gallery-carousel-item splide__slide\"><div class=\"kadence-blocks-gallery-item\"><div class=\"kadence-blocks-gallery-item-inner\"><figure class=\"kb-gallery-figure kb-gallery-item-has-link kadence-blocks-gallery-item-has-caption\"><a href=\"https:\/\/tw.lneya.com\/oil-temperature-control-units\" class=\"kb-gallery-item-link\" target=\"_blank\" rel=\"noopener noreferrer\"><div class=\"kb-gal-image-radius\"><div class=\"kb-gallery-image-contain\" ><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/KRY\u6cb9\u51b7-2.png\" width=\"870\" height=\"630\" alt=\"\" data-full-image=\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/KRY\u6cb9\u51b7-2.png\" data-light-image=\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/KRY\u6cb9\u51b7-2.png\" data-id=\"13137\" class=\"wp-image-13137 skip-lazy\" srcset=\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/KRY\u6cb9\u51b7-2.png 870w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/KRY\u6cb9\u51b7-2-300x217.png 300w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/KRY\u6cb9\u51b7-2-768x556.png 768w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/KRY\u6cb9\u51b7-2-18x12.png 18w\" sizes=\"auto, (max-width: 870px) 100vw, 870px\" \/><\/div><\/div><div class=\"kadence-blocks-gallery-item__caption\">oil chiller<\/div><\/a><\/figure><\/div><\/div><\/li><li class=\"kb-slide-item kb-gallery-carousel-item splide__slide\"><div class=\"kadence-blocks-gallery-item\"><div class=\"kadence-blocks-gallery-item-inner\"><figure class=\"kb-gallery-figure kb-gallery-item-has-link kadence-blocks-gallery-item-has-caption\"><a href=\"https:\/\/tw.lneya.com\/semiconductor-chillers\" class=\"kb-gallery-item-link\" target=\"_blank\" rel=\"noopener noreferrer\"><div class=\"kb-gal-image-radius\"><div class=\"kb-gallery-image-contain\" ><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/sundi\u53d8\u9891.png\" width=\"870\" height=\"630\" alt=\"SUNDI series VFD water chiller heater\" data-full-image=\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/sundi\u53d8\u9891.png\" data-light-image=\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/sundi\u53d8\u9891.png\" data-id=\"13088\" class=\"wp-image-13088 skip-lazy\" srcset=\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/sundi\u53d8\u9891.png 870w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/sundi\u53d8\u9891-300x217.png 300w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/sundi\u53d8\u9891-768x556.png 768w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/sundi\u53d8\u9891-18x12.png 18w\" sizes=\"auto, (max-width: 870px) 100vw, 870px\" \/><\/div><\/div><div class=\"kadence-blocks-gallery-item__caption\">semiconductor chiller <\/div><\/a><\/figure><\/div><\/div><\/li><\/ul><\/div><\/div><\/div><\/div>\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n\n<section class=\"wp-block-themepark-block-themepark-area block_layout thempark-block undefined\" id=\"\" style=\"background-color:#014391;padding-top:31px;\" data-swiper-parallax=\"-700\"><div class=\"block_layout_in\" style=\"max-width:2000px;\">\n<div class=\"wp-block-column block_layout_in is-layout-flow wp-block-column-is-layout-flow\">\n<div class=\"wp-block-columns is-layout-flex 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Please try again later<\/div><div class=\"e-email\">Email error!<\/div><div class=\"e-tel\">Wrong phone number!<\/div><\/div><\/div><\/form><\/div><div class=\"wp_clear\"><\/div><\/div><div class=\"themepark-comment_in_b\" style=\"opacity:0.83;background-color:#ffffff;transform:scaleX(1.089) scaleY(1.0129)\"><\/div><\/div><\/div><div class=\"wp_clear\"><\/div><\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div><div class=\"layout_badh\"><\/div><\/section>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n","protected":false},"excerpt":{"rendered":"<p>Semiconductor Chiller Applications in Modern Wafer fabrication Wafers are the core material for manufacturing semiconductor chips. They are generally round, thin sheets made of high-purity silicon. Transistors, capacitors, resistors, and multi-layer interconnect structures are constructed on their surfaces through processes such as photolithography, etching, and thin film deposition. Therefore, the quality of the wafer directly determines the performance of the chip. Wafer processing is susceptible to temperature. Temperature fluctuations will affect the etching depth, photoresist development effect, and film stress distribution, thereby affecting the consistency of the microstructure. Therefore, the wafer fabrication\u00a0must be equipped with a high-precision, fast-response, and long-term stable temperature control system. High-precision temperature control is essential equipment [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_kad_blocks_custom_css":"","_kad_blocks_head_custom_js":"","_kad_blocks_body_custom_js":"","_kad_blocks_footer_custom_js":"","themepark_post_bcolor":"#f5f5f5","themepark_post_width":"1022px","themepark_post_img":"","themepark_post_img_po":"left","themepark_post_img_re":false,"themepark_post_img_cover":false,"themepark_post_img_fixed":false,"themepark_post_hide_title":true,"themepark_post_main_b":"","themepark_post_main_p":100,"themepark_paddingblock":true,"footnotes":""},"categories":[326],"tags":[156,376],"class_list":["post-14520","post","type-post","status-publish","format-standard","hentry","category-blog","tag-semiconductor-chiller","tag-wafer-fabs"],"metadata":{"_kad_blocks_custom_css":[""],"_kad_blocks_head_custom_js":[""],"_kad_blocks_body_custom_js":[""],"_kad_blocks_footer_custom_js":[""],"themepark_post_bcolor":["#f5f5f5"],"themepark_post_width":["1022px"],"themepark_post_img":[""],"themepark_post_img_po":["left"],"themepark_post_img_re":[""],"themepark_post_img_cover":[""],"themepark_post_img_fixed":[""],"themepark_post_hide_title":["1"],"themepark_post_main_b":[""],"themepark_post_main_p":["100"],"themepark_paddingblock":["1"],"footnotes":[""],"themepark_seo_title":["Semiconductor Chiller Applications in Modern Wafer fabrication"],"themepark_seo_description":["Discover how chillers ensure precise temperature control in wafer fabs. Learn key applications in lithography, etching, CMP, and more."],"catce":["procbl"],"views":["2130"],"_lwptoc_settings":["a:2:{s:7:\"enabled\";b:1;s:15:\"processHeadings\";b:1;}"],"themepark_seo_keyword":["wafer fabs,semiconductor chiller"],"_dp_original":["14511"],"_edit_lock":["1764750283:1"],"_edit_last":["1"],"rank_math_og_content_image":["a:2:{s:5:\"check\";s:32:\"6acf97b43eb88c189b2228f9f2029f5d\";s:6:\"images\";a:1:{i:0;i:12539;}}"]},"taxonomy_info":{"category":[{"value":326,"label":"blog"}],"post_tag":[{"value":156,"label":"semiconductor chiller"},{"value":376,"label":"wafer fabs"}]},"featured_image_src_large":false,"author_info":{"display_name":"lneyaadmindy","author_link":"https:\/\/tw.lneya.com\/ja\/author\/lneyaadmindy"},"comment_info":0,"category_info":[{"term_id":326,"name":"blog","slug":"blog","term_group":0,"term_taxonomy_id":326,"taxonomy":"category","description":"","parent":0,"count":278,"filter":"raw","cat_ID":326,"category_count":278,"category_description":"","cat_name":"blog","category_nicename":"blog","category_parent":0}],"tag_info":[{"term_id":156,"name":"semiconductor chiller","slug":"semiconductor-chiller","term_group":0,"term_taxonomy_id":156,"taxonomy":"post_tag","description":"","parent":0,"count":22,"filter":"raw"},{"term_id":376,"name":"wafer fabs","slug":"wafer-fabs","term_group":0,"term_taxonomy_id":376,"taxonomy":"post_tag","description":"","parent":0,"count":1,"filter":"raw"}],"medium_url":false,"thumbnail_url":false,"full_url":false,"_links":{"self":[{"href":"https:\/\/tw.lneya.com\/ja\/wp-json\/wp\/v2\/posts\/14520","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/tw.lneya.com\/ja\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/tw.lneya.com\/ja\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/tw.lneya.com\/ja\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/tw.lneya.com\/ja\/wp-json\/wp\/v2\/comments?post=14520"}],"version-history":[{"count":0,"href":"https:\/\/tw.lneya.com\/ja\/wp-json\/wp\/v2\/posts\/14520\/revisions"}],"wp:attachment":[{"href":"https:\/\/tw.lneya.com\/ja\/wp-json\/wp\/v2\/media?parent=14520"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/tw.lneya.com\/ja\/wp-json\/wp\/v2\/categories?post=14520"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/tw.lneya.com\/ja\/wp-json\/wp\/v2\/tags?post=14520"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}