{"id":17105,"date":"2025-12-09T15:11:55","date_gmt":"2025-12-09T07:11:55","guid":{"rendered":"https:\/\/www.lneya.com\/?p=17105"},"modified":"2025-12-09T15:15:54","modified_gmt":"2025-12-09T07:15:54","slug":"temperature-control-in-photolithography","status":"publish","type":"post","link":"https:\/\/tw.lneya.com\/ru\/blog\/temperature-control-in-photolithography.html","title":{"rendered":"Temperature Control in Photolithography"},"content":{"rendered":"\n<section class=\"wp-block-themepark-block-themepark-area block_layout thempark-block undefined\" id=\"\" style=\"background-color:#fcfcfc;\" data-swiper-parallax=\"-700\"><div class=\"block_layout_in\" style=\"max-width:900px;\">\n<div class=\"wp-block-column block_layout_in is-layout-flow wp-block-column-is-layout-flow\">\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_16aef6-8d, .wp-block-kadence-advancedheading.kt-adv-heading17105_16aef6-8d[data-kb-block=\"kb-adv-heading17105_16aef6-8d\"]{text-align:center;font-size:45px;font-weight:600;font-style:normal;font-family:Poppins;text-transform:none;letter-spacing:0.2px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_16aef6-8d mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_16aef6-8d[data-kb-block=\"kb-adv-heading17105_16aef6-8d\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_16aef6-8d img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_16aef6-8d[data-kb-block=\"kb-adv-heading17105_16aef6-8d\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<h1 class=\"kt-adv-heading17105_16aef6-8d wp-block-kadence-advancedheading has-black-color has-text-color\" data-kb-block=\"kb-adv-heading17105_16aef6-8d\">Temperature Control\u00a0in Photolithography<\/h1>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-8f761849 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_e08706-09, .wp-block-kadence-advancedheading.kt-adv-heading17105_e08706-09[data-kb-block=\"kb-adv-heading17105_e08706-09\"]{font-size:16px;line-height:2.1;font-weight:400;font-style:normal;font-family:Poppins;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading17105_e08706-09 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_e08706-09[data-kb-block=\"kb-adv-heading17105_e08706-09\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_e08706-09 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_e08706-09[data-kb-block=\"kb-adv-heading17105_e08706-09\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading17105_e08706-09 wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading17105_e08706-09\">In photolithography, high-precision temperature control enables repeatable pattern transfer and improves yield. This article explains what photolithography is, why thermal stability matters, which tool elements need precise temperature, common control methods, how semiconductor chillers fit into the system.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_9fcf17-38, .wp-block-kadence-advancedheading.kt-adv-heading17105_9fcf17-38[data-kb-block=\"kb-adv-heading17105_9fcf17-38\"]{text-align:left;font-size:40px;font-weight:600;font-style:normal;font-family:Poppins;}.wp-block-kadence-advancedheading.kt-adv-heading17105_9fcf17-38 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_9fcf17-38[data-kb-block=\"kb-adv-heading17105_9fcf17-38\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_9fcf17-38 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_9fcf17-38[data-kb-block=\"kb-adv-heading17105_9fcf17-38\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<h2 class=\"kt-adv-heading17105_9fcf17-38 wp-block-kadence-advancedheading has-black-color has-text-color\" data-kb-block=\"kb-adv-heading17105_9fcf17-38\">What is Photolithography?<\/h2>\n\n\n\n<hr class=\"wp-block-separator has-text-color has-black-color has-alpha-channel-opacity has-black-background-color has-background is-style-default\"\/>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_817eca-1f, .wp-block-kadence-advancedheading.kt-adv-heading17105_817eca-1f[data-kb-block=\"kb-adv-heading17105_817eca-1f\"]{font-size:16px;line-height:2.1;font-weight:400;font-style:normal;font-family:Poppins;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading17105_817eca-1f mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_817eca-1f[data-kb-block=\"kb-adv-heading17105_817eca-1f\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_817eca-1f img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_817eca-1f[data-kb-block=\"kb-adv-heading17105_817eca-1f\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading17105_817eca-1f wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading17105_817eca-1f\">Photolithography is the process of transferring circuit patterns onto a silicon wafer using light, photoresist, and precision optics.<br>\u00a0<br>It combines coating, exposure, development, and baking steps. Photolithography operates at micro and nanoscale dimensions. The process starts with wafer cleaning and resist coating, proceeds to exposure through a photomask or reticle, and ends with development and post-exposure bake.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter size-large is-resized\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"683\" src=\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/12\/1af4b85e-0c62-4e58-b497-f5e39265d3d1-1-1024x683.webp\" alt=\"Photolithography\" class=\"wp-image-17111\" style=\"object-fit:cover;width:900px;height:400px\" srcset=\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/12\/1af4b85e-0c62-4e58-b497-f5e39265d3d1-1-1024x683.webp 1024w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/12\/1af4b85e-0c62-4e58-b497-f5e39265d3d1-1-300x200.webp 300w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/12\/1af4b85e-0c62-4e58-b497-f5e39265d3d1-1-768x512.webp 768w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/12\/1af4b85e-0c62-4e58-b497-f5e39265d3d1-1-18x12.webp 18w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/12\/1af4b85e-0c62-4e58-b497-f5e39265d3d1-1.webp 1228w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n<\/div>\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_f8888b-ba, .wp-block-kadence-advancedheading.kt-adv-heading17105_f8888b-ba[data-kb-block=\"kb-adv-heading17105_f8888b-ba\"]{text-align:left;font-size:40px;font-weight:600;font-style:normal;font-family:Poppins;}.wp-block-kadence-advancedheading.kt-adv-heading17105_f8888b-ba mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_f8888b-ba[data-kb-block=\"kb-adv-heading17105_f8888b-ba\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_f8888b-ba img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_f8888b-ba[data-kb-block=\"kb-adv-heading17105_f8888b-ba\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<h2 class=\"kt-adv-heading17105_f8888b-ba wp-block-kadence-advancedheading has-black-color has-text-color\" data-kb-block=\"kb-adv-heading17105_f8888b-ba\">Why Temperature Control Matters in Photolithography?<\/h2>\n\n\n\n<hr class=\"wp-block-separator has-text-color has-black-color has-alpha-channel-opacity has-black-background-color has-background is-style-default\"\/>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_0c6a33-ae, .wp-block-kadence-advancedheading.kt-adv-heading17105_0c6a33-ae[data-kb-block=\"kb-adv-heading17105_0c6a33-ae\"]{font-size:16px;line-height:2.1;font-weight:400;font-style:normal;font-family:Poppins;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading17105_0c6a33-ae mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_0c6a33-ae[data-kb-block=\"kb-adv-heading17105_0c6a33-ae\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_0c6a33-ae img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_0c6a33-ae[data-kb-block=\"kb-adv-heading17105_0c6a33-ae\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading17105_0c6a33-ae wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading17105_0c6a33-ae\">Temperature Control in Photolithography\u00a0refer to the\u00a0absolute temperature and temperature uniformity\u00a0across components and wafers.\u00a0<br>\u00a0<br>Thermal conditions influence resist chemistry, optical focus, and mechanical alignment. Slight temperature increases change resist reaction rates and diffusion during baking, which shifts critical dimensions.<br>\u00a0<br>Optics are also temperature sensitive, since variations in lens temperature or refractive index push the focal plane out of position. Mechanical components such as the wafer stage expand or contract with heat, introducing small alignment errors that accumulate across layers.<br>\u00a0<br>This small deviations translate into critical dimension errors, overlay shifts, and increased scrap, so thermal stability is essential for consistent device performance and high yield.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_9865e0-12, .wp-block-kadence-advancedheading.kt-adv-heading17105_9865e0-12[data-kb-block=\"kb-adv-heading17105_9865e0-12\"]{text-align:left;font-size:40px;font-weight:600;font-style:normal;font-family:Poppins;}.wp-block-kadence-advancedheading.kt-adv-heading17105_9865e0-12 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_9865e0-12[data-kb-block=\"kb-adv-heading17105_9865e0-12\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_9865e0-12 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_9865e0-12[data-kb-block=\"kb-adv-heading17105_9865e0-12\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<h2 class=\"kt-adv-heading17105_9865e0-12 wp-block-kadence-advancedheading has-black-color has-text-color\" data-kb-block=\"kb-adv-heading17105_9865e0-12\">What are the Key Temperature-Controlled Components?<\/h2>\n\n\n\n<hr class=\"wp-block-separator has-text-color has-black-color has-alpha-channel-opacity has-black-background-color has-background is-style-default\"\/>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_291e84-bf, .wp-block-kadence-advancedheading.kt-adv-heading17105_291e84-bf[data-kb-block=\"kb-adv-heading17105_291e84-bf\"]{font-size:16px;line-height:2.1;font-weight:400;font-style:normal;font-family:Poppins;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading17105_291e84-bf mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_291e84-bf[data-kb-block=\"kb-adv-heading17105_291e84-bf\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_291e84-bf img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_291e84-bf[data-kb-block=\"kb-adv-heading17105_291e84-bf\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading17105_291e84-bf wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading17105_291e84-bf\">The main lithography components requiring temperature control are the wafer stage, projection optics, exposure source, resist coating and bake modules, and coolant loops.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_2ecd49-3e, .wp-block-kadence-advancedheading.kt-adv-heading17105_2ecd49-3e[data-kb-block=\"kb-adv-heading17105_2ecd49-3e\"]{text-align:left;font-size:26px;font-weight:600;font-style:normal;font-family:Poppins;}.wp-block-kadence-advancedheading.kt-adv-heading17105_2ecd49-3e mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_2ecd49-3e[data-kb-block=\"kb-adv-heading17105_2ecd49-3e\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_2ecd49-3e img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_2ecd49-3e[data-kb-block=\"kb-adv-heading17105_2ecd49-3e\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<h3 class=\"kt-adv-heading17105_2ecd49-3e wp-block-kadence-advancedheading has-black-color has-text-color\" data-kb-block=\"kb-adv-heading17105_2ecd49-3e\">1.Wafer stage<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_a31458-45, .wp-block-kadence-advancedheading.kt-adv-heading17105_a31458-45[data-kb-block=\"kb-adv-heading17105_a31458-45\"]{font-size:16px;line-height:2.1;font-weight:400;font-style:normal;font-family:Poppins;letter-spacing:0.2px;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading17105_a31458-45 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_a31458-45[data-kb-block=\"kb-adv-heading17105_a31458-45\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_a31458-45 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_a31458-45[data-kb-block=\"kb-adv-heading17105_a31458-45\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading17105_a31458-45 wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading17105_a31458-45\">The wafer stage must remain uniform in temperature so position sensors and metrology corrections remain valid.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_612a36-f7, .wp-block-kadence-advancedheading.kt-adv-heading17105_612a36-f7[data-kb-block=\"kb-adv-heading17105_612a36-f7\"]{text-align:left;font-size:26px;font-weight:600;font-style:normal;font-family:Poppins;}.wp-block-kadence-advancedheading.kt-adv-heading17105_612a36-f7 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_612a36-f7[data-kb-block=\"kb-adv-heading17105_612a36-f7\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_612a36-f7 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_612a36-f7[data-kb-block=\"kb-adv-heading17105_612a36-f7\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<h3 class=\"kt-adv-heading17105_612a36-f7 wp-block-kadence-advancedheading has-black-color has-text-color\" data-kb-block=\"kb-adv-heading17105_612a36-f7\">2.Projection optics and lenses<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_c5df1f-12, .wp-block-kadence-advancedheading.kt-adv-heading17105_c5df1f-12[data-kb-block=\"kb-adv-heading17105_c5df1f-12\"]{font-size:16px;line-height:2.1;font-weight:400;font-style:normal;font-family:Poppins;letter-spacing:0.2px;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading17105_c5df1f-12 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_c5df1f-12[data-kb-block=\"kb-adv-heading17105_c5df1f-12\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_c5df1f-12 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_c5df1f-12[data-kb-block=\"kb-adv-heading17105_c5df1f-12\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading17105_c5df1f-12 wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading17105_c5df1f-12\">Optical elements change refractive index and physical dimensions with temperature. Stable cooling or localized heating prevents focus shift and aberration.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_80d7c2-41, .wp-block-kadence-advancedheading.kt-adv-heading17105_80d7c2-41[data-kb-block=\"kb-adv-heading17105_80d7c2-41\"]{text-align:left;font-size:26px;font-weight:600;font-style:normal;font-family:Poppins;}.wp-block-kadence-advancedheading.kt-adv-heading17105_80d7c2-41 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_80d7c2-41[data-kb-block=\"kb-adv-heading17105_80d7c2-41\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_80d7c2-41 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_80d7c2-41[data-kb-block=\"kb-adv-heading17105_80d7c2-41\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<h3 class=\"kt-adv-heading17105_80d7c2-41 wp-block-kadence-advancedheading has-black-color has-text-color\" data-kb-block=\"kb-adv-heading17105_80d7c2-41\">3.Exposure source (lasers or lamps)<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_af2a2a-8f, .wp-block-kadence-advancedheading.kt-adv-heading17105_af2a2a-8f[data-kb-block=\"kb-adv-heading17105_af2a2a-8f\"]{font-size:16px;line-height:2.1;font-weight:400;font-style:normal;font-family:Poppins;letter-spacing:0.2px;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading17105_af2a2a-8f mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_af2a2a-8f[data-kb-block=\"kb-adv-heading17105_af2a2a-8f\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_af2a2a-8f img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_af2a2a-8f[data-kb-block=\"kb-adv-heading17105_af2a2a-8f\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading17105_af2a2a-8f wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading17105_af2a2a-8f\">High-intensity light sources create rapid heat swings. Source cooling preserves beam profile and output stability, which directly affects exposure dose.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_54f592-9a, .wp-block-kadence-advancedheading.kt-adv-heading17105_54f592-9a[data-kb-block=\"kb-adv-heading17105_54f592-9a\"]{text-align:left;font-size:26px;font-weight:600;font-style:normal;font-family:Poppins;}.wp-block-kadence-advancedheading.kt-adv-heading17105_54f592-9a mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_54f592-9a[data-kb-block=\"kb-adv-heading17105_54f592-9a\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_54f592-9a img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_54f592-9a[data-kb-block=\"kb-adv-heading17105_54f592-9a\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<h3 class=\"kt-adv-heading17105_54f592-9a wp-block-kadence-advancedheading has-black-color has-text-color\" data-kb-block=\"kb-adv-heading17105_54f592-9a\">4.Coating, bake, and development modules<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_75746f-92, .wp-block-kadence-advancedheading.kt-adv-heading17105_75746f-92[data-kb-block=\"kb-adv-heading17105_75746f-92\"]{font-size:16px;line-height:2.1;font-weight:400;font-style:normal;font-family:Poppins;letter-spacing:0.2px;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading17105_75746f-92 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_75746f-92[data-kb-block=\"kb-adv-heading17105_75746f-92\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_75746f-92 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_75746f-92[data-kb-block=\"kb-adv-heading17105_75746f-92\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading17105_75746f-92 wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading17105_75746f-92\">Soft-bake and post-exposure bake recipes require exact plate temperatures to control resist flow and crosslinking. Developer temperature affects contrast and critical dimension control.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_5a89b8-da, .wp-block-kadence-advancedheading.kt-adv-heading17105_5a89b8-da[data-kb-block=\"kb-adv-heading17105_5a89b8-da\"]{text-align:left;font-size:26px;font-weight:600;font-style:normal;font-family:Poppins;}.wp-block-kadence-advancedheading.kt-adv-heading17105_5a89b8-da mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_5a89b8-da[data-kb-block=\"kb-adv-heading17105_5a89b8-da\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_5a89b8-da img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_5a89b8-da[data-kb-block=\"kb-adv-heading17105_5a89b8-da\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<h3 class=\"kt-adv-heading17105_5a89b8-da wp-block-kadence-advancedheading has-black-color has-text-color\" data-kb-block=\"kb-adv-heading17105_5a89b8-da\">5.Internal coolant loops and sensors<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_aa4807-7b, .wp-block-kadence-advancedheading.kt-adv-heading17105_aa4807-7b[data-kb-block=\"kb-adv-heading17105_aa4807-7b\"]{font-size:16px;line-height:2.1;font-weight:400;font-style:normal;font-family:Poppins;letter-spacing:0.2px;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading17105_aa4807-7b mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_aa4807-7b[data-kb-block=\"kb-adv-heading17105_aa4807-7b\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_aa4807-7b img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_aa4807-7b[data-kb-block=\"kb-adv-heading17105_aa4807-7b\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading17105_aa4807-7b wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading17105_aa4807-7b\"><strong>Closed-loop fluid circuits<\/strong>\u00a0feed optics, stages, and electronics. Sensors along these loops provide feedback for PID control and alarm conditions.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-8f761849 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\"><style>.wp-block-kadence-column.kb-section-dir-horizontal > .kt-inside-inner-col > .kt-info-box17105_4493da-3b .kt-blocks-info-box-link-wrap{max-width:unset;}.kt-info-box17105_4493da-3b .kt-blocks-info-box-link-wrap{border-top:5px solid var(--global-palette7, #eeeeee);border-right:5px solid var(--global-palette7, #eeeeee);border-bottom:5px solid var(--global-palette7, #eeeeee);border-left:5px solid var(--global-palette7, #eeeeee);border-top-left-radius:30px;border-top-right-radius:30px;border-bottom-right-radius:30px;border-bottom-left-radius:30px;background:#ffffff;padding-top:var(--global-kb-spacing-xs, 1rem);padding-right:var(--global-kb-spacing-xs, 1rem);padding-bottom:var(--global-kb-spacing-xs, 1rem);padding-left:var(--global-kb-spacing-xs, 1rem);}.kt-info-box17105_4493da-3b.wp-block-kadence-infobox{max-width:100%;}.kt-info-box17105_4493da-3b .kadence-info-box-image-inner-intrisic-container{max-width:170px;}.kt-info-box17105_4493da-3b .kadence-info-box-image-inner-intrisic-container .kadence-info-box-image-intrisic{padding-bottom:78.4672%;width:1096px;height:0px;max-width:100%;}.kt-info-box17105_4493da-3b .kadence-info-box-icon-container .kt-info-svg-icon, .kt-info-box17105_4493da-3b .kt-info-svg-icon-flip, .kt-info-box17105_4493da-3b .kt-blocks-info-box-number{font-size:50px;}.kt-info-box17105_4493da-3b .kt-blocks-info-box-media{border-color:var(--global-palette7, #eeeeee);border-radius:200px;overflow:hidden;border-top-width:0px;border-right-width:0px;border-bottom-width:0px;border-left-width:0px;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;margin-top:0px;margin-right:20px;margin-bottom:0px;margin-left:0px;}.kt-info-box17105_4493da-3b .kt-infobox-textcontent h3.kt-blocks-info-box-title{font-size:20px;font-family:Poppins;font-style:normal;font-weight:600;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;margin-top:5px;margin-right:0px;margin-bottom:10px;margin-left:0px;}.wp-block-kadence-infobox.kt-info-box17105_4493da-3b .kt-blocks-info-box-text{font-size:14px;line-height:30px;font-family:Poppins;font-style:normal;font-weight:400;}.kt-info-box17105_4493da-3b .kt-blocks-info-box-learnmore{background:transparent;border-width:0px 0px 0px 0px;padding-top:4px;padding-right:8px;padding-bottom:4px;padding-left:8px;margin-top:10px;margin-right:0px;margin-bottom:10px;margin-left:0px;}@media all and (max-width: 1024px){.kt-info-box17105_4493da-3b .kt-blocks-info-box-link-wrap{border-top:5px solid var(--global-palette7, #eeeeee);border-right:5px solid var(--global-palette7, #eeeeee);border-bottom:5px solid var(--global-palette7, #eeeeee);border-left:5px solid var(--global-palette7, #eeeeee);}}@media all and (max-width: 767px){.kt-info-box17105_4493da-3b .kt-blocks-info-box-link-wrap{border-top:5px solid var(--global-palette7, #eeeeee);border-right:5px solid var(--global-palette7, #eeeeee);border-bottom:5px solid var(--global-palette7, #eeeeee);border-left:5px solid var(--global-palette7, #eeeeee);}}<\/style>\n<div class=\"wp-block-kadence-infobox kt-info-box17105_4493da-3b\"><a class=\"kt-blocks-info-box-link-wrap info-box-link kt-blocks-info-box-media-align-left kt-info-halign-left\" target=\"_blank\" rel=\"noopener noreferrer\" href=\"\/blog\/closed-loop-coolant-circuits-in-chillers.html\"><div class=\"kt-blocks-info-box-media-container\"><div class=\"kt-blocks-info-box-media kt-info-media-animate-none\"><div class=\"kadence-info-box-image-inner-intrisic-container\"><div class=\"kadence-info-box-image-intrisic kt-info-animate-none\"><div class=\"kadence-info-box-image-inner-intrisic\"><img loading=\"lazy\" decoding=\"async\" src=\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2023\/05\/banner4.jpg\" alt=\"closed loop chiller \" width=\"1096\" height=\"860\" class=\"kt-info-box-image wp-image-1021\" srcset=\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2023\/05\/banner4.jpg 1096w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2023\/05\/banner4-300x235.jpg 300w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2023\/05\/banner4-1024x804.jpg 1024w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2023\/05\/banner4-768x603.jpg 768w\" sizes=\"auto, (max-width: 1096px) 100vw, 1096px\" \/><\/div><\/div><\/div><\/div><\/div><div class=\"kt-infobox-textcontent\"><h3 class=\"kt-blocks-info-box-title\">Closed Loop Coolant Circuits in Chillers<\/h3><p class=\"kt-blocks-info-box-text\">A closed cooling loop means that the coolant always circulates in a closed system and does not come into contact with the outside air.<\/p><\/div><\/a><\/div>\n<\/div>\n<\/div>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_ba77fd-0f, .wp-block-kadence-advancedheading.kt-adv-heading17105_ba77fd-0f[data-kb-block=\"kb-adv-heading17105_ba77fd-0f\"]{text-align:left;font-size:40px;font-weight:600;font-style:normal;font-family:Poppins;}.wp-block-kadence-advancedheading.kt-adv-heading17105_ba77fd-0f mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_ba77fd-0f[data-kb-block=\"kb-adv-heading17105_ba77fd-0f\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_ba77fd-0f img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_ba77fd-0f[data-kb-block=\"kb-adv-heading17105_ba77fd-0f\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<h2 class=\"kt-adv-heading17105_ba77fd-0f wp-block-kadence-advancedheading has-black-color has-text-color\" data-kb-block=\"kb-adv-heading17105_ba77fd-0f\">What are the Methods Used for Temperature Control in Photolithography?<\/h2>\n\n\n\n<hr class=\"wp-block-separator has-text-color has-black-color has-alpha-channel-opacity has-black-background-color has-background is-style-default\"\/>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_361a86-51, .wp-block-kadence-advancedheading.kt-adv-heading17105_361a86-51[data-kb-block=\"kb-adv-heading17105_361a86-51\"]{font-size:16px;line-height:2.1;font-weight:400;font-style:normal;font-family:Poppins;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading17105_361a86-51 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_361a86-51[data-kb-block=\"kb-adv-heading17105_361a86-51\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_361a86-51 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_361a86-51[data-kb-block=\"kb-adv-heading17105_361a86-51\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading17105_361a86-51 wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading17105_361a86-51\">Photolithography combines room-level environmental control, tool-level thermal modules, and precision liquid cooling. Below are the primary methods\u00a0and where it is typically applied.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_26f998-8a, .wp-block-kadence-advancedheading.kt-adv-heading17105_26f998-8a[data-kb-block=\"kb-adv-heading17105_26f998-8a\"]{text-align:left;font-size:26px;font-weight:600;font-style:normal;font-family:Poppins;}.wp-block-kadence-advancedheading.kt-adv-heading17105_26f998-8a mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_26f998-8a[data-kb-block=\"kb-adv-heading17105_26f998-8a\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_26f998-8a img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_26f998-8a[data-kb-block=\"kb-adv-heading17105_26f998-8a\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<h3 class=\"kt-adv-heading17105_26f998-8a wp-block-kadence-advancedheading has-black-color has-text-color\" data-kb-block=\"kb-adv-heading17105_26f998-8a\">1.Precision chillers and recirculating fluid loops<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_5ffaf2-db, .wp-block-kadence-advancedheading.kt-adv-heading17105_5ffaf2-db[data-kb-block=\"kb-adv-heading17105_5ffaf2-db\"]{font-size:16px;line-height:2.1;font-weight:400;font-style:normal;font-family:Poppins;letter-spacing:0.2px;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading17105_5ffaf2-db mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_5ffaf2-db[data-kb-block=\"kb-adv-heading17105_5ffaf2-db\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_5ffaf2-db img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_5ffaf2-db[data-kb-block=\"kb-adv-heading17105_5ffaf2-db\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading17105_5ffaf2-db wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading17105_5ffaf2-db\">Supply stable coolant to optics, stages, and light sources, maintaining setpoint under varying heat load.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full is-resized\"><a href=\"\/precision-chillers\" target=\"_blank\" rel=\" noreferrer noopener\"><img loading=\"lazy\" decoding=\"async\" width=\"690\" height=\"446\" src=\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/07\/UC-SERIES.jpg\" alt=\"high precision chiller\" class=\"wp-image-14732\" style=\"aspect-ratio:16\/9;object-fit:cover;width:900px\" srcset=\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/07\/UC-SERIES.jpg 690w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/07\/UC-SERIES-300x194.jpg 300w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/07\/UC-SERIES-18x12.jpg 18w\" sizes=\"auto, (max-width: 690px) 100vw, 690px\" \/><\/a><\/figure>\n<\/div>\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_6a0361-74, .wp-block-kadence-advancedheading.kt-adv-heading17105_6a0361-74[data-kb-block=\"kb-adv-heading17105_6a0361-74\"]{text-align:left;font-size:26px;font-weight:600;font-style:normal;font-family:Poppins;}.wp-block-kadence-advancedheading.kt-adv-heading17105_6a0361-74 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_6a0361-74[data-kb-block=\"kb-adv-heading17105_6a0361-74\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_6a0361-74 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_6a0361-74[data-kb-block=\"kb-adv-heading17105_6a0361-74\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<h3 class=\"kt-adv-heading17105_6a0361-74 wp-block-kadence-advancedheading has-black-color has-text-color\" data-kb-block=\"kb-adv-heading17105_6a0361-74\">2.Environmental control systems<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_2b9b4d-a6, .wp-block-kadence-advancedheading.kt-adv-heading17105_2b9b4d-a6[data-kb-block=\"kb-adv-heading17105_2b9b4d-a6\"]{font-size:16px;line-height:2.1;font-weight:400;font-style:normal;font-family:Poppins;letter-spacing:0.2px;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading17105_2b9b4d-a6 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_2b9b4d-a6[data-kb-block=\"kb-adv-heading17105_2b9b4d-a6\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_2b9b4d-a6 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_2b9b4d-a6[data-kb-block=\"kb-adv-heading17105_2b9b4d-a6\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading17105_2b9b4d-a6 wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading17105_2b9b4d-a6\"><a href=\"\/precision-ac\" target=\"_blank\" rel=\"noreferrer noopener\">Cleanroom precision AC<\/a>\u00a0keeps ambient temperature and relative humidity within narrow limits, reducing external thermal influence.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_472e26-46, .wp-block-kadence-advancedheading.kt-adv-heading17105_472e26-46[data-kb-block=\"kb-adv-heading17105_472e26-46\"]{text-align:left;font-size:26px;font-weight:600;font-style:normal;font-family:Poppins;}.wp-block-kadence-advancedheading.kt-adv-heading17105_472e26-46 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_472e26-46[data-kb-block=\"kb-adv-heading17105_472e26-46\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_472e26-46 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_472e26-46[data-kb-block=\"kb-adv-heading17105_472e26-46\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<h3 class=\"kt-adv-heading17105_472e26-46 wp-block-kadence-advancedheading has-black-color has-text-color\" data-kb-block=\"kb-adv-heading17105_472e26-46\">3.Active heating plates and bake units<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_9f6304-e9, .wp-block-kadence-advancedheading.kt-adv-heading17105_9f6304-e9[data-kb-block=\"kb-adv-heading17105_9f6304-e9\"]{font-size:16px;line-height:2.1;font-weight:400;font-style:normal;font-family:Poppins;letter-spacing:0.2px;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading17105_9f6304-e9 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_9f6304-e9[data-kb-block=\"kb-adv-heading17105_9f6304-e9\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_9f6304-e9 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_9f6304-e9[data-kb-block=\"kb-adv-heading17105_9f6304-e9\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading17105_9f6304-e9 wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading17105_9f6304-e9\">Provide controlled thermal ramps for resist soft-bake and post-exposure bake, controlled by PID loops.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_0d1d04-cf, .wp-block-kadence-advancedheading.kt-adv-heading17105_0d1d04-cf[data-kb-block=\"kb-adv-heading17105_0d1d04-cf\"]{text-align:left;font-size:26px;font-weight:600;font-style:normal;font-family:Poppins;}.wp-block-kadence-advancedheading.kt-adv-heading17105_0d1d04-cf mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_0d1d04-cf[data-kb-block=\"kb-adv-heading17105_0d1d04-cf\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_0d1d04-cf img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_0d1d04-cf[data-kb-block=\"kb-adv-heading17105_0d1d04-cf\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<h3 class=\"kt-adv-heading17105_0d1d04-cf wp-block-kadence-advancedheading has-black-color has-text-color\" data-kb-block=\"kb-adv-heading17105_0d1d04-cf\">4.Localized thermal isolation and enclosures<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_f402e2-27, .wp-block-kadence-advancedheading.kt-adv-heading17105_f402e2-27[data-kb-block=\"kb-adv-heading17105_f402e2-27\"]{font-size:16px;line-height:2.1;font-weight:400;font-style:normal;font-family:Poppins;letter-spacing:0.2px;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading17105_f402e2-27 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_f402e2-27[data-kb-block=\"kb-adv-heading17105_f402e2-27\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_f402e2-27 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_f402e2-27[data-kb-block=\"kb-adv-heading17105_f402e2-27\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading17105_f402e2-27 wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading17105_f402e2-27\">Minimize cross-talk from adjacent modules and protect sensitive optics from airborne thermal perturbations.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_fd2879-82, .wp-block-kadence-advancedheading.kt-adv-heading17105_fd2879-82[data-kb-block=\"kb-adv-heading17105_fd2879-82\"]{text-align:left;font-size:26px;font-weight:600;font-style:normal;font-family:Poppins;}.wp-block-kadence-advancedheading.kt-adv-heading17105_fd2879-82 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_fd2879-82[data-kb-block=\"kb-adv-heading17105_fd2879-82\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_fd2879-82 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_fd2879-82[data-kb-block=\"kb-adv-heading17105_fd2879-82\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<h3 class=\"kt-adv-heading17105_fd2879-82 wp-block-kadence-advancedheading has-black-color has-text-color\" data-kb-block=\"kb-adv-heading17105_fd2879-82\">5.Real-time sensor networks and closed-loop control<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_acc2fb-c3, .wp-block-kadence-advancedheading.kt-adv-heading17105_acc2fb-c3[data-kb-block=\"kb-adv-heading17105_acc2fb-c3\"]{font-size:16px;line-height:2.1;font-weight:400;font-style:normal;font-family:Poppins;letter-spacing:0.2px;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading17105_acc2fb-c3 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_acc2fb-c3[data-kb-block=\"kb-adv-heading17105_acc2fb-c3\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_acc2fb-c3 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_acc2fb-c3[data-kb-block=\"kb-adv-heading17105_acc2fb-c3\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading17105_acc2fb-c3 wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading17105_acc2fb-c3\">Distributed temperature sensors feed controllers that adjust <a href=\"\/blog\/what-is-the-importance-of-the-flow-rate-in-chiller.html\" target=\"_blank\" rel=\"noreferrer noopener\">flow rate<\/a>, heater power, or valve position to maintain uniformity.<br>\u00a0<br>In practice, <a href=\"\/blog\/semiconductor-chiller-applications-in-modern-wafer-fabrication.html\" target=\"_blank\" rel=\"noreferrer noopener\">fabs<\/a>\u00a0use combinations of these approaches. For instance, a tool may rely on cleanroom stability for baseline control, while chillers and localized heaters handle dynamic loads during exposures.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_cbf4a6-21, .wp-block-kadence-advancedheading.kt-adv-heading17105_cbf4a6-21[data-kb-block=\"kb-adv-heading17105_cbf4a6-21\"]{text-align:left;font-size:40px;font-weight:600;font-style:normal;font-family:Poppins;}.wp-block-kadence-advancedheading.kt-adv-heading17105_cbf4a6-21 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_cbf4a6-21[data-kb-block=\"kb-adv-heading17105_cbf4a6-21\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_cbf4a6-21 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_cbf4a6-21[data-kb-block=\"kb-adv-heading17105_cbf4a6-21\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<h2 class=\"kt-adv-heading17105_cbf4a6-21 wp-block-kadence-advancedheading has-black-color has-text-color\" data-kb-block=\"kb-adv-heading17105_cbf4a6-21\">How Semiconductor Chillers Support Photolithography?<\/h2>\n\n\n\n<hr class=\"wp-block-separator has-text-color has-black-color has-alpha-channel-opacity has-black-background-color has-background is-style-default\"\/>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_6fc66a-4e, .wp-block-kadence-advancedheading.kt-adv-heading17105_6fc66a-4e[data-kb-block=\"kb-adv-heading17105_6fc66a-4e\"]{font-size:16px;line-height:2.1;font-weight:400;font-style:normal;font-family:Poppins;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading17105_6fc66a-4e mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_6fc66a-4e[data-kb-block=\"kb-adv-heading17105_6fc66a-4e\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_6fc66a-4e img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_6fc66a-4e[data-kb-block=\"kb-adv-heading17105_6fc66a-4e\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading17105_6fc66a-4e wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading17105_6fc66a-4e\"><a href=\"\/semiconductor-chillers\" target=\"_blank\" rel=\"noreferrer noopener\">Semiconductor chillers<\/a>\u00a0provide the high-precision liquid temperature control needed to stabilize optics, stages, and sources. They remove heat reliably, minimize temperature noise, and support rapid response to transient heat loads.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter size-full is-resized\"><a href=\"\/semiconductor-chillers\" target=\"_blank\" rel=\" noreferrer noopener\"><img loading=\"lazy\" decoding=\"async\" width=\"370\" height=\"370\" src=\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/1-1.png\" alt=\"semiconductor chillers\" class=\"wp-image-12598\" style=\"object-fit:cover;width:350px;height:350px\" srcset=\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/1-1.png 370w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/1-1-300x300.png 300w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/1-1-150x150.png 150w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/1-1-12x12.png 12w\" sizes=\"auto, (max-width: 370px) 100vw, 370px\" \/><\/a><\/figure>\n<\/div>\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_11e0db-e0, .wp-block-kadence-advancedheading.kt-adv-heading17105_11e0db-e0[data-kb-block=\"kb-adv-heading17105_11e0db-e0\"]{text-align:left;font-size:26px;font-weight:600;font-style:normal;font-family:Poppins;}.wp-block-kadence-advancedheading.kt-adv-heading17105_11e0db-e0 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_11e0db-e0[data-kb-block=\"kb-adv-heading17105_11e0db-e0\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_11e0db-e0 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_11e0db-e0[data-kb-block=\"kb-adv-heading17105_11e0db-e0\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<h3 class=\"kt-adv-heading17105_11e0db-e0 wp-block-kadence-advancedheading has-black-color has-text-color\" data-kb-block=\"kb-adv-heading17105_11e0db-e0\">1.Tight temperature stability<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_2e588f-b1, .wp-block-kadence-advancedheading.kt-adv-heading17105_2e588f-b1[data-kb-block=\"kb-adv-heading17105_2e588f-b1\"]{font-size:16px;line-height:2.1;font-weight:400;font-style:normal;font-family:Poppins;letter-spacing:0.2px;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading17105_2e588f-b1 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_2e588f-b1[data-kb-block=\"kb-adv-heading17105_2e588f-b1\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_2e588f-b1 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_2e588f-b1[data-kb-block=\"kb-adv-heading17105_2e588f-b1\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading17105_2e588f-b1 wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading17105_2e588f-b1\">Chillers can hold fluid to within \u00b10.05\u00b0C, or better for demanding processes, which reduces thermal drift across wafers.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_facb26-33, .wp-block-kadence-advancedheading.kt-adv-heading17105_facb26-33[data-kb-block=\"kb-adv-heading17105_facb26-33\"]{text-align:left;font-size:26px;font-weight:600;font-style:normal;font-family:Poppins;}.wp-block-kadence-advancedheading.kt-adv-heading17105_facb26-33 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_facb26-33[data-kb-block=\"kb-adv-heading17105_facb26-33\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_facb26-33 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_facb26-33[data-kb-block=\"kb-adv-heading17105_facb26-33\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<h3 class=\"kt-adv-heading17105_facb26-33 wp-block-kadence-advancedheading has-black-color has-text-color\" data-kb-block=\"kb-adv-heading17105_facb26-33\">2.Fast response to heat load changes<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_a93a15-98, .wp-block-kadence-advancedheading.kt-adv-heading17105_a93a15-98[data-kb-block=\"kb-adv-heading17105_a93a15-98\"]{font-size:16px;line-height:2.1;font-weight:400;font-style:normal;font-family:Poppins;letter-spacing:0.2px;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading17105_a93a15-98 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_a93a15-98[data-kb-block=\"kb-adv-heading17105_a93a15-98\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_a93a15-98 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_a93a15-98[data-kb-block=\"kb-adv-heading17105_a93a15-98\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading17105_a93a15-98 wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading17105_a93a15-98\">Variable-speed pumps and advanced control loops allow quick compensation when exposure energy spikes.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_81cbc5-64, .wp-block-kadence-advancedheading.kt-adv-heading17105_81cbc5-64[data-kb-block=\"kb-adv-heading17105_81cbc5-64\"]{text-align:left;font-size:26px;font-weight:600;font-style:normal;font-family:Poppins;}.wp-block-kadence-advancedheading.kt-adv-heading17105_81cbc5-64 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_81cbc5-64[data-kb-block=\"kb-adv-heading17105_81cbc5-64\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_81cbc5-64 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_81cbc5-64[data-kb-block=\"kb-adv-heading17105_81cbc5-64\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<h3 class=\"kt-adv-heading17105_81cbc5-64 wp-block-kadence-advancedheading has-black-color has-text-color\" data-kb-block=\"kb-adv-heading17105_81cbc5-64\">3.Fluid compatibility and cleanliness<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_7d851a-51, .wp-block-kadence-advancedheading.kt-adv-heading17105_7d851a-51[data-kb-block=\"kb-adv-heading17105_7d851a-51\"]{font-size:16px;line-height:2.1;font-weight:400;font-style:normal;font-family:Poppins;letter-spacing:0.2px;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading17105_7d851a-51 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_7d851a-51[data-kb-block=\"kb-adv-heading17105_7d851a-51\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_7d851a-51 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_7d851a-51[data-kb-block=\"kb-adv-heading17105_7d851a-51\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading17105_7d851a-51 wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading17105_7d851a-51\">Units that handle <a href=\"\/blog\/chiller-fluids-water-glycol-oil-and-more.html\" target=\"_blank\" rel=\"noreferrer noopener\">DI water or controlled coolant mixtures<\/a>\u00a0avoid corrosion and particle contamination that would harm optics.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_b95558-76, .wp-block-kadence-advancedheading.kt-adv-heading17105_b95558-76[data-kb-block=\"kb-adv-heading17105_b95558-76\"]{text-align:left;font-size:26px;font-weight:600;font-style:normal;font-family:Poppins;}.wp-block-kadence-advancedheading.kt-adv-heading17105_b95558-76 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_b95558-76[data-kb-block=\"kb-adv-heading17105_b95558-76\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_b95558-76 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_b95558-76[data-kb-block=\"kb-adv-heading17105_b95558-76\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<h3 class=\"kt-adv-heading17105_b95558-76 wp-block-kadence-advancedheading has-black-color has-text-color\" data-kb-block=\"kb-adv-heading17105_b95558-76\">4.Monitoring, alarms, and safety<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_c572da-db, .wp-block-kadence-advancedheading.kt-adv-heading17105_c572da-db[data-kb-block=\"kb-adv-heading17105_c572da-db\"]{font-size:16px;line-height:2.1;font-weight:400;font-style:normal;font-family:Poppins;letter-spacing:0.2px;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading17105_c572da-db mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_c572da-db[data-kb-block=\"kb-adv-heading17105_c572da-db\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_c572da-db img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_c572da-db[data-kb-block=\"kb-adv-heading17105_c572da-db\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading17105_c572da-db wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading17105_c572da-db\">Built-in flow sensors, leak detection, and remote alerts prevent silent failures that would otherwise cause tool excursions.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_d99919-c2, .wp-block-kadence-advancedheading.kt-adv-heading17105_d99919-c2[data-kb-block=\"kb-adv-heading17105_d99919-c2\"]{text-align:left;font-size:26px;font-weight:600;font-style:normal;font-family:Poppins;}.wp-block-kadence-advancedheading.kt-adv-heading17105_d99919-c2 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_d99919-c2[data-kb-block=\"kb-adv-heading17105_d99919-c2\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_d99919-c2 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_d99919-c2[data-kb-block=\"kb-adv-heading17105_d99919-c2\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<h3 class=\"kt-adv-heading17105_d99919-c2 wp-block-kadence-advancedheading has-black-color has-text-color\" data-kb-block=\"kb-adv-heading17105_d99919-c2\">5.Redundancy and reliability<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_096d34-fd, .wp-block-kadence-advancedheading.kt-adv-heading17105_096d34-fd[data-kb-block=\"kb-adv-heading17105_096d34-fd\"]{font-size:16px;line-height:2.1;font-weight:400;font-style:normal;font-family:Poppins;letter-spacing:0.2px;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading17105_096d34-fd mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_096d34-fd[data-kb-block=\"kb-adv-heading17105_096d34-fd\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_096d34-fd img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_096d34-fd[data-kb-block=\"kb-adv-heading17105_096d34-fd\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading17105_096d34-fd wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading17105_096d34-fd\">Many fabs configure chillers\u00a0with redundancy to avoid unplanned downtime during continuous production.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_5e517a-02, .wp-block-kadence-advancedheading.kt-adv-heading17105_5e517a-02[data-kb-block=\"kb-adv-heading17105_5e517a-02\"]{text-align:left;font-size:40px;font-weight:600;font-style:normal;font-family:Poppins;}.wp-block-kadence-advancedheading.kt-adv-heading17105_5e517a-02 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_5e517a-02[data-kb-block=\"kb-adv-heading17105_5e517a-02\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_5e517a-02 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_5e517a-02[data-kb-block=\"kb-adv-heading17105_5e517a-02\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<h2 class=\"kt-adv-heading17105_5e517a-02 wp-block-kadence-advancedheading has-black-color has-text-color\" data-kb-block=\"kb-adv-heading17105_5e517a-02\">Choosing the Right Temperature Control System for Lithography<\/h2>\n\n\n\n<hr class=\"wp-block-separator has-text-color has-black-color has-alpha-channel-opacity has-black-background-color has-background is-style-default\"\/>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_2b8c4e-2c, .wp-block-kadence-advancedheading.kt-adv-heading17105_2b8c4e-2c[data-kb-block=\"kb-adv-heading17105_2b8c4e-2c\"]{font-size:16px;line-height:2.1;font-weight:400;font-style:normal;font-family:Poppins;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading17105_2b8c4e-2c mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_2b8c4e-2c[data-kb-block=\"kb-adv-heading17105_2b8c4e-2c\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_2b8c4e-2c img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_2b8c4e-2c[data-kb-block=\"kb-adv-heading17105_2b8c4e-2c\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading17105_2b8c4e-2c wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading17105_2b8c4e-2c\">Selecting a system requires balancing precision, capacity, fluid compatibility, response time, and supportability.\u00a0Semiconductor chillers and precision air conditioners are often essential equipment in semiconductor factories.<br>\u00a0<br>If you are looking for a reliable temperature control solution for photolithography processes, LNEYA\u00a0is happy to provide you with free technical support.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedbtn.kb-btns17105_e867f3-ae{gap:var(--global-kb-gap-xs, 0.5rem );justify-content:center;align-items:center;}.kt-btns17105_e867f3-ae .kt-button{font-weight:normal;font-style:normal;}.kt-btns17105_e867f3-ae .kt-btn-wrap-0{margin-right:5px;}.wp-block-kadence-advancedbtn.kt-btns17105_e867f3-ae .kt-btn-wrap-0 .kt-button{color:#555555;border-color:#555555;}.wp-block-kadence-advancedbtn.kt-btns17105_e867f3-ae .kt-btn-wrap-0 .kt-button:hover, .wp-block-kadence-advancedbtn.kt-btns17105_e867f3-ae .kt-btn-wrap-0 .kt-button:focus{color:#ffffff;border-color:#444444;}.wp-block-kadence-advancedbtn.kt-btns17105_e867f3-ae .kt-btn-wrap-0 .kt-button::before{display:none;}.wp-block-kadence-advancedbtn.kt-btns17105_e867f3-ae .kt-btn-wrap-0 .kt-button:hover, .wp-block-kadence-advancedbtn.kt-btns17105_e867f3-ae .kt-btn-wrap-0 .kt-button:focus{background:#444444;}<\/style>\n<div class=\"wp-block-kadence-advancedbtn kb-buttons-wrap kb-btns17105_e867f3-ae\"><style>ul.menu .wp-block-kadence-advancedbtn .kb-btn17105_da4976-c6.kb-button{width:initial;}.wp-block-kadence-advancedbtn .kb-btn17105_da4976-c6.kb-button{color:#2a619b;border-top-color:#2a619b;border-top-style:solid;border-right-color:#2a619b;border-right-style:solid;border-bottom-color:#2a619b;border-bottom-style:solid;border-left-color:#2a619b;border-left-style:solid;}@media all and (max-width: 1024px){.wp-block-kadence-advancedbtn .kb-btn17105_da4976-c6.kb-button{border-top-color:#2a619b;border-top-style:solid;border-right-color:#2a619b;border-right-style:solid;border-bottom-color:#2a619b;border-bottom-style:solid;border-left-color:#2a619b;border-left-style:solid;}}@media all and (max-width: 767px){.wp-block-kadence-advancedbtn .kb-btn17105_da4976-c6.kb-button{border-top-color:#2a619b;border-top-style:solid;border-right-color:#2a619b;border-right-style:solid;border-bottom-color:#2a619b;border-bottom-style:solid;border-left-color:#2a619b;border-left-style:solid;}}<\/style><a class=\"kb-button kt-button button kb-btn17105_da4976-c6 kt-btn-size-large kt-btn-width-type-auto kb-btn-global-outline kt-btn-has-text-true kt-btn-has-svg-false wp-block-kadence-singlebtn\" href=\"https:\/\/tw.lneya.com\/contact\"><span class=\"kt-btn-inner-text\">Let us know your requirements<\/span><\/a><\/div>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n<\/div>\n<\/div>\n<\/div>\n<\/div><div class=\"layout_badh\"><\/div><\/section>\n\n\n\n<section class=\"wp-block-themepark-block-themepark-area block_layout thempark-block undefined\" id=\"\" style=\"background-color:#fcfcfc;\" data-swiper-parallax=\"-700\"><div class=\"block_layout_in\" style=\"max-width:900px;\">\n<div class=\"wp-block-column block_layout_in is-layout-flow wp-block-column-is-layout-flow\">\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-8f761849 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\"><\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\"><\/div>\n<\/div>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_562bde-fe, .wp-block-kadence-advancedheading.kt-adv-heading17105_562bde-fe[data-kb-block=\"kb-adv-heading17105_562bde-fe\"]{text-align:center;font-size:40px;font-weight:600;font-style:normal;font-family:Poppins;}.wp-block-kadence-advancedheading.kt-adv-heading17105_562bde-fe mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_562bde-fe[data-kb-block=\"kb-adv-heading17105_562bde-fe\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_562bde-fe img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_562bde-fe[data-kb-block=\"kb-adv-heading17105_562bde-fe\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<h2 class=\"kt-adv-heading17105_562bde-fe wp-block-kadence-advancedheading has-black-color has-text-color\" data-kb-block=\"kb-adv-heading17105_562bde-fe\">FAQ<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.kt-accordion-id17105_1ab8d2-c6 .kt-accordion-inner-wrap{column-gap:var(--global-kb-gap-md, 2rem);row-gap:10px;}.kt-accordion-id17105_1ab8d2-c6 .kt-accordion-panel-inner{border-top:0px solid transparent;border-right:0px solid transparent;border-bottom:0px solid transparent;border-left:0px solid transparent;padding-top:30px;padding-right:30px;padding-bottom:30px;padding-left:30px;}.kt-accordion-id17105_1ab8d2-c6 > .kt-accordion-inner-wrap > .wp-block-kadence-pane > .kt-accordion-header-wrap > .kt-blocks-accordion-header{border-top-left-radius:10px;border-top-right-radius:10px;border-bottom-right-radius:10px;border-bottom-left-radius:10px;background:rgba(171,184,195,0.22);font-size:18px;line-height:26px;font-family:Mulish;font-weight:400;color:#000000;padding-top:14px;padding-right:16px;padding-bottom:14px;padding-left:16px;}.kt-accordion-id17105_1ab8d2-c6:not( .kt-accodion-icon-style-basiccircle ):not( .kt-accodion-icon-style-xclosecircle ):not( .kt-accodion-icon-style-arrowcircle )  > .kt-accordion-inner-wrap > .wp-block-kadence-pane > .kt-accordion-header-wrap .kt-blocks-accordion-icon-trigger:after, .kt-accordion-id17105_1ab8d2-c6:not( .kt-accodion-icon-style-basiccircle ):not( .kt-accodion-icon-style-xclosecircle ):not( .kt-accodion-icon-style-arrowcircle )  > .kt-accordion-inner-wrap > .wp-block-kadence-pane > .kt-accordion-header-wrap .kt-blocks-accordion-icon-trigger:before{background:#000000;}.kt-accordion-id17105_1ab8d2-c6 .kt-accordion-panel-inner, .kt-accordion-id17105_1ab8d2-c6 .kt-accordion-panel-inner h1, .kt-accordion-id17105_1ab8d2-c6 .kt-accordion-panel-inner h2, .kt-accordion-id17105_1ab8d2-c6 .kt-accordion-panel-inner h3, .kt-accordion-id17105_1ab8d2-c6 .kt-accordion-panel-inner h4, .kt-accordion-id17105_1ab8d2-c6 .kt-accordion-panel-inner h5, .kt-accordion-id17105_1ab8d2-c6 .kt-accordion-panel-inner h6{color:#4a4a4a;}.kt-accordion-id17105_1ab8d2-c6:not( .kt-accodion-icon-style-basic ):not( .kt-accodion-icon-style-xclose ):not( .kt-accodion-icon-style-arrow ) .kt-blocks-accordion-icon-trigger{background:#000000;}.kt-accordion-id17105_1ab8d2-c6:not( .kt-accodion-icon-style-basic ):not( .kt-accodion-icon-style-xclose ):not( .kt-accodion-icon-style-arrow ) .kt-blocks-accordion-icon-trigger:after, .kt-accordion-id17105_1ab8d2-c6:not( .kt-accodion-icon-style-basic ):not( .kt-accodion-icon-style-xclose ):not( .kt-accodion-icon-style-arrow ) .kt-blocks-accordion-icon-trigger:before{background:rgba(171,184,195,0.22);}.kt-accordion-id17105_1ab8d2-c6 > .kt-accordion-inner-wrap > .wp-block-kadence-pane > .kt-accordion-header-wrap > .kt-blocks-accordion-header:hover, \n\t\t\t\tbody:not(.hide-focus-outline) .kt-accordion-id17105_1ab8d2-c6 .kt-blocks-accordion-header:focus-visible{color:#ffffff;background:#014391;border-top-color:#ffffff;border-top-style:solid;border-right-color:#ffffff;border-right-style:solid;border-bottom-color:#ffffff;border-bottom-style:solid;border-left-color:#ffffff;border-left-style:solid;}.kt-accordion-id17105_1ab8d2-c6:not( .kt-accodion-icon-style-basiccircle ):not( .kt-accodion-icon-style-xclosecircle ):not( .kt-accodion-icon-style-arrowcircle ) .kt-accordion-header-wrap .kt-blocks-accordion-header:hover .kt-blocks-accordion-icon-trigger:after, .kt-accordion-id17105_1ab8d2-c6:not( .kt-accodion-icon-style-basiccircle ):not( .kt-accodion-icon-style-xclosecircle ):not( .kt-accodion-icon-style-arrowcircle ) .kt-accordion-header-wrap .kt-blocks-accordion-header:hover .kt-blocks-accordion-icon-trigger:before, body:not(.hide-focus-outline) .kt-accordion-id17105_1ab8d2-c6:not( .kt-accodion-icon-style-basiccircle ):not( .kt-accodion-icon-style-xclosecircle ):not( .kt-accodion-icon-style-arrowcircle ) .kt-blocks-accordion--visible .kt-blocks-accordion-icon-trigger:after, body:not(.hide-focus-outline) .kt-accordion-id17105_1ab8d2-c6:not( .kt-accodion-icon-style-basiccircle ):not( .kt-accodion-icon-style-xclosecircle ):not( .kt-accodion-icon-style-arrowcircle ) .kt-blocks-accordion-header:focus-visible .kt-blocks-accordion-icon-trigger:before{background:#ffffff;}.kt-accordion-id17105_1ab8d2-c6:not( .kt-accodion-icon-style-basic ):not( .kt-accodion-icon-style-xclose ):not( .kt-accodion-icon-style-arrow ) .kt-accordion-header-wrap .kt-blocks-accordion-header:hover .kt-blocks-accordion-icon-trigger, body:not(.hide-focus-outline) .kt-accordion-id17105_1ab8d2-c6:not( .kt-accodion-icon-style-basic ):not( .kt-accodion-icon-style-xclose ):not( .kt-accodion-icon-style-arrow ) .kt-accordion-header-wrap .kt-blocks-accordion-header:focus-visible .kt-blocks-accordion-icon-trigger{background:#ffffff;}.kt-accordion-id17105_1ab8d2-c6:not( .kt-accodion-icon-style-basic ):not( .kt-accodion-icon-style-xclose ):not( .kt-accodion-icon-style-arrow ) .kt-accordion-header-wrap .kt-blocks-accordion-header:hover .kt-blocks-accordion-icon-trigger:after, .kt-accordion-id17105_1ab8d2-c6:not( .kt-accodion-icon-style-basic ):not( .kt-accodion-icon-style-xclose ):not( .kt-accodion-icon-style-arrow ) .kt-accordion-header-wrap .kt-blocks-accordion-header:hover .kt-blocks-accordion-icon-trigger:before, body:not(.hide-focus-outline) .kt-accordion-id17105_1ab8d2-c6:not( .kt-accodion-icon-style-basic ):not( .kt-accodion-icon-style-xclose ):not( .kt-accodion-icon-style-arrow ) .kt-accordion-header-wrap .kt-blocks-accordion-header:focus-visible .kt-blocks-accordion-icon-trigger:after, body:not(.hide-focus-outline) .kt-accordion-id17105_1ab8d2-c6:not( .kt-accodion-icon-style-basic ):not( .kt-accodion-icon-style-xclose ):not( .kt-accodion-icon-style-arrow ) .kt-accordion-header-wrap .kt-blocks-accordion-header:focus-visible .kt-blocks-accordion-icon-trigger:before{background:#014391;}.kt-accordion-id17105_1ab8d2-c6 .kt-accordion-header-wrap .kt-blocks-accordion-header:focus-visible,\n\t\t\t\t.kt-accordion-id17105_1ab8d2-c6 > .kt-accordion-inner-wrap > .wp-block-kadence-pane > .kt-accordion-header-wrap > .kt-blocks-accordion-header.kt-accordion-panel-active{color:#ffffff;background:#014391;border-top-color:rgba(68,68,68,0);border-top-style:solid;border-right-color:#eeeeee;border-right-style:solid;border-bottom-color:#eeeeee;border-bottom-style:solid;border-left-color:#0e9cd1;border-left-style:solid;}.kt-accordion-id17105_1ab8d2-c6:not( .kt-accodion-icon-style-basiccircle ):not( .kt-accodion-icon-style-xclosecircle ):not( .kt-accodion-icon-style-arrowcircle )  > .kt-accordion-inner-wrap > .wp-block-kadence-pane > .kt-accordion-header-wrap > .kt-blocks-accordion-header.kt-accordion-panel-active .kt-blocks-accordion-icon-trigger:after, .kt-accordion-id17105_1ab8d2-c6:not( .kt-accodion-icon-style-basiccircle ):not( .kt-accodion-icon-style-xclosecircle ):not( .kt-accodion-icon-style-arrowcircle )  > .kt-accordion-inner-wrap > .wp-block-kadence-pane > .kt-accordion-header-wrap > .kt-blocks-accordion-header.kt-accordion-panel-active .kt-blocks-accordion-icon-trigger:before{background:#ffffff;}.kt-accordion-id17105_1ab8d2-c6:not( .kt-accodion-icon-style-basic ):not( .kt-accodion-icon-style-xclose ):not( .kt-accodion-icon-style-arrow ) .kt-blocks-accordion-header.kt-accordion-panel-active .kt-blocks-accordion-icon-trigger{background:#ffffff;}.kt-accordion-id17105_1ab8d2-c6:not( .kt-accodion-icon-style-basic ):not( .kt-accodion-icon-style-xclose ):not( .kt-accodion-icon-style-arrow ) .kt-blocks-accordion-header.kt-accordion-panel-active .kt-blocks-accordion-icon-trigger:after, .kt-accordion-id17105_1ab8d2-c6:not( .kt-accodion-icon-style-basic ):not( .kt-accodion-icon-style-xclose ):not( .kt-accodion-icon-style-arrow ) .kt-blocks-accordion-header.kt-accordion-panel-active .kt-blocks-accordion-icon-trigger:before{background:#014391;}@media all and (max-width: 1024px){.kt-accordion-id17105_1ab8d2-c6 .kt-accordion-panel-inner{border-top:0px solid transparent;border-right:0px solid transparent;border-bottom:0px solid transparent;border-left:0px solid transparent;}}@media all and (max-width: 1024px){.kt-accordion-id17105_1ab8d2-c6 > .kt-accordion-inner-wrap > .wp-block-kadence-pane > .kt-accordion-header-wrap > .kt-blocks-accordion-header:hover, \n\t\t\t\tbody:not(.hide-focus-outline) .kt-accordion-id17105_1ab8d2-c6 .kt-blocks-accordion-header:focus-visible{border-top-color:#ffffff;border-top-style:solid;border-right-color:#ffffff;border-right-style:solid;border-bottom-color:#ffffff;border-bottom-style:solid;border-left-color:#ffffff;border-left-style:solid;}}@media all and (max-width: 1024px){.kt-accordion-id17105_1ab8d2-c6 .kt-accordion-header-wrap .kt-blocks-accordion-header:focus-visible,\n\t\t\t\t.kt-accordion-id17105_1ab8d2-c6 > .kt-accordion-inner-wrap > .wp-block-kadence-pane > .kt-accordion-header-wrap > .kt-blocks-accordion-header.kt-accordion-panel-active{border-top-color:rgba(68,68,68,0);border-top-style:solid;border-right-color:#eeeeee;border-right-style:solid;border-bottom-color:#eeeeee;border-bottom-style:solid;border-left-color:#0e9cd1;border-left-style:solid;}}@media all and (max-width: 767px){.kt-accordion-id17105_1ab8d2-c6 .kt-accordion-inner-wrap{display:block;}.kt-accordion-id17105_1ab8d2-c6 .kt-accordion-inner-wrap .kt-accordion-pane:not(:first-child){margin-top:10px;}.kt-accordion-id17105_1ab8d2-c6 .kt-accordion-panel-inner{border-top:0px solid transparent;border-right:0px solid transparent;border-bottom:0px solid transparent;border-left:0px solid transparent;}.kt-accordion-id17105_1ab8d2-c6 > .kt-accordion-inner-wrap > .wp-block-kadence-pane > .kt-accordion-header-wrap > .kt-blocks-accordion-header:hover, \n\t\t\t\tbody:not(.hide-focus-outline) .kt-accordion-id17105_1ab8d2-c6 .kt-blocks-accordion-header:focus-visible{border-top-color:#ffffff;border-top-style:solid;border-right-color:#ffffff;border-right-style:solid;border-bottom-color:#ffffff;border-bottom-style:solid;border-left-color:#ffffff;border-left-style:solid;}.kt-accordion-id17105_1ab8d2-c6 .kt-accordion-header-wrap .kt-blocks-accordion-header:focus-visible,\n\t\t\t\t.kt-accordion-id17105_1ab8d2-c6 > .kt-accordion-inner-wrap > .wp-block-kadence-pane > .kt-accordion-header-wrap > .kt-blocks-accordion-header.kt-accordion-panel-active{border-top-color:rgba(68,68,68,0);border-top-style:solid;border-right-color:#eeeeee;border-right-style:solid;border-bottom-color:#eeeeee;border-bottom-style:solid;border-left-color:#0e9cd1;border-left-style:solid;}}<\/style>\n<div class=\"wp-block-kadence-accordion alignnone\"><div class=\"kt-accordion-wrap kt-accordion-id17105_1ab8d2-c6 kt-accordion-has-10-panes kt-active-pane-0 kt-accordion-block kt-pane-header-alignment-left kt-accodion-icon-style-arrow kt-accodion-icon-side-right\" style=\"max-width:none\"><div class=\"kt-accordion-inner-wrap\" data-allow-multiple-open=\"false\" data-start-open=\"none\">\n<div class=\"wp-block-kadence-pane kt-accordion-pane kt-accordion-pane-1 kt-pane17105_cd2005-b9\"><div class=\"kt-accordion-header-wrap\"><button class=\"kt-blocks-accordion-header kt-acccordion-button-label-show\" type=\"button\"><span class=\"kt-blocks-accordion-title-wrap\"><span class=\"kb-svg-icon-wrap kb-svg-icon-fe_alignCenter kt-btn-side-left\"><svg viewBox=\"0 0 24 24\"  fill=\"none\" stroke=\"currentColor\" stroke-width=\"2\" stroke-linecap=\"round\" stroke-linejoin=\"round\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"  aria-hidden=\"true\"><line x1=\"18\" y1=\"10\" x2=\"6\" y2=\"10\"\/><line x1=\"21\" y1=\"6\" x2=\"3\" y2=\"6\"\/><line x1=\"21\" y1=\"14\" x2=\"3\" y2=\"14\"\/><line x1=\"18\" y1=\"18\" x2=\"6\" y2=\"18\"\/><\/svg><\/span><span class=\"kt-blocks-accordion-title\">Which parts of a lithography tool need the most precise temperature control?<\/span><\/span><span class=\"kt-blocks-accordion-icon-trigger\"><\/span><\/button><\/div><div class=\"kt-accordion-panel kt-accordion-panel-hidden\"><div class=\"kt-accordion-panel-inner\"><style>.wp-block-kadence-advancedheading.kt-adv-heading17105_7d6692-02, .wp-block-kadence-advancedheading.kt-adv-heading17105_7d6692-02[data-kb-block=\"kb-adv-heading17105_7d6692-02\"]{font-size:18px;font-weight:400;font-style:normal;font-family:Mulish;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading17105_7d6692-02 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_7d6692-02[data-kb-block=\"kb-adv-heading17105_7d6692-02\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_7d6692-02 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_7d6692-02[data-kb-block=\"kb-adv-heading17105_7d6692-02\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading17105_7d6692-02 wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading17105_7d6692-02\">Key areas include the wafer stage, projection optics, exposure source, bake modules, and internal coolant loops. These components generate or absorb heat during operation and directly influence pattern fidelity.<\/p>\n<\/div><\/div><\/div>\n\n\n\n<div class=\"wp-block-kadence-pane kt-accordion-pane kt-accordion-pane-2 kt-pane17105_ff01b3-05\"><div class=\"kt-accordion-header-wrap\"><button class=\"kt-blocks-accordion-header kt-acccordion-button-label-show\" type=\"button\"><span class=\"kt-blocks-accordion-title-wrap\"><span class=\"kb-svg-icon-wrap kb-svg-icon-fe_alignCenter kt-btn-side-left\"><svg viewBox=\"0 0 24 24\"  fill=\"none\" stroke=\"currentColor\" stroke-width=\"2\" stroke-linecap=\"round\" stroke-linejoin=\"round\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"  aria-hidden=\"true\"><line x1=\"18\" y1=\"10\" x2=\"6\" y2=\"10\"\/><line x1=\"21\" y1=\"6\" x2=\"3\" y2=\"6\"\/><line x1=\"21\" y1=\"14\" x2=\"3\" y2=\"14\"\/><line x1=\"18\" y1=\"18\" x2=\"6\" y2=\"18\"\/><\/svg><\/span><span class=\"kt-blocks-accordion-title\">What temperature stability do lithography processes typically require?<\/span><\/span><span class=\"kt-blocks-accordion-icon-trigger\"><\/span><\/button><\/div><div class=\"kt-accordion-panel kt-accordion-panel-hidden\"><div class=\"kt-accordion-panel-inner\"><style>.wp-block-kadence-advancedheading.kt-adv-heading17105_6e0694-7b, .wp-block-kadence-advancedheading.kt-adv-heading17105_6e0694-7b[data-kb-block=\"kb-adv-heading17105_6e0694-7b\"]{font-size:18px;font-weight:400;font-style:normal;font-family:Mulish;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading17105_6e0694-7b mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_6e0694-7b[data-kb-block=\"kb-adv-heading17105_6e0694-7b\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_6e0694-7b img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_6e0694-7b[data-kb-block=\"kb-adv-heading17105_6e0694-7b\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading17105_6e0694-7b wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading17105_6e0694-7b\">Most lithography steps require temperature stability within a few tenths of a degree, and certain components such as wafer stages or projection optics may need control within a few hundredths of a degree to avoid drift.<\/p>\n<\/div><\/div><\/div>\n\n\n\n<div class=\"wp-block-kadence-pane kt-accordion-pane kt-accordion-pane-8 kt-pane17105_127baa-f3\"><div class=\"kt-accordion-header-wrap\"><button class=\"kt-blocks-accordion-header kt-acccordion-button-label-show\" type=\"button\"><span class=\"kt-blocks-accordion-title-wrap\"><span class=\"kb-svg-icon-wrap kb-svg-icon-fe_alignCenter kt-btn-side-left\"><svg viewBox=\"0 0 24 24\"  fill=\"none\" stroke=\"currentColor\" stroke-width=\"2\" stroke-linecap=\"round\" stroke-linejoin=\"round\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"  aria-hidden=\"true\"><line x1=\"18\" y1=\"10\" x2=\"6\" y2=\"10\"\/><line x1=\"21\" y1=\"6\" x2=\"3\" y2=\"6\"\/><line x1=\"21\" y1=\"14\" x2=\"3\" y2=\"14\"\/><line x1=\"18\" y1=\"18\" x2=\"6\" y2=\"18\"\/><\/svg><\/span><span class=\"kt-blocks-accordion-title\">What temperature accuracy can a semiconductor chiller achieve?<\/span><\/span><span class=\"kt-blocks-accordion-icon-trigger\"><\/span><\/button><\/div><div class=\"kt-accordion-panel kt-accordion-panel-hidden\"><div class=\"kt-accordion-panel-inner\"><style>.wp-block-kadence-advancedheading.kt-adv-heading17105_34ae74-65, .wp-block-kadence-advancedheading.kt-adv-heading17105_34ae74-65[data-kb-block=\"kb-adv-heading17105_34ae74-65\"]{font-size:18px;font-weight:400;font-style:normal;font-family:Mulish;}.wp-block-kadence-advancedheading.kt-adv-heading17105_34ae74-65 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_34ae74-65[data-kb-block=\"kb-adv-heading17105_34ae74-65\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_34ae74-65 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_34ae74-65[data-kb-block=\"kb-adv-heading17105_34ae74-65\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading17105_34ae74-65 wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading17105_34ae74-65\">High-end semiconductor chillers typically offer temperature control within \u00b10.05\u00b0C, and advanced models can reach tighter stability when paired with optimized sensors and PID tuning.<\/p>\n<\/div><\/div><\/div>\n\n\n\n<div class=\"wp-block-kadence-pane kt-accordion-pane kt-accordion-pane-9 kt-pane17105_2a089b-5f\"><div class=\"kt-accordion-header-wrap\"><button class=\"kt-blocks-accordion-header kt-acccordion-button-label-show\" type=\"button\"><span class=\"kt-blocks-accordion-title-wrap\"><span class=\"kb-svg-icon-wrap kb-svg-icon-fe_alignCenter kt-btn-side-left\"><svg viewBox=\"0 0 24 24\"  fill=\"none\" stroke=\"currentColor\" stroke-width=\"2\" stroke-linecap=\"round\" stroke-linejoin=\"round\" xmlns=\"http:\/\/www.w3.org\/2000\/svg\"  aria-hidden=\"true\"><line x1=\"18\" y1=\"10\" x2=\"6\" y2=\"10\"\/><line x1=\"21\" y1=\"6\" x2=\"3\" y2=\"6\"\/><line x1=\"21\" y1=\"14\" x2=\"3\" y2=\"14\"\/><line x1=\"18\" y1=\"18\" x2=\"6\" y2=\"18\"\/><\/svg><\/span><span class=\"kt-blocks-accordion-title\">What coolant is used in photolithography temperature control loops?<\/span><\/span><span class=\"kt-blocks-accordion-icon-trigger\"><\/span><\/button><\/div><div class=\"kt-accordion-panel kt-accordion-panel-hidden\"><div class=\"kt-accordion-panel-inner\"><style>.wp-block-kadence-advancedheading.kt-adv-heading17105_de4acc-7a, .wp-block-kadence-advancedheading.kt-adv-heading17105_de4acc-7a[data-kb-block=\"kb-adv-heading17105_de4acc-7a\"]{font-size:18px;font-weight:400;font-style:normal;font-family:Mulish;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading17105_de4acc-7a mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_de4acc-7a[data-kb-block=\"kb-adv-heading17105_de4acc-7a\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_de4acc-7a img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_de4acc-7a[data-kb-block=\"kb-adv-heading17105_de4acc-7a\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading17105_de4acc-7a wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading17105_de4acc-7a\">Typical coolants include DI water, water-glycol mixtures, or specially filtered fluids depending on the component. Optics and laser sources usually require high-purity DI water to prevent contamination or corrosion.<\/p>\n<\/div><\/div><\/div>\n\n\n\n<div class=\"wp-block-kadence-pane kt-accordion-pane kt-accordion-pane-10 kt-pane17105_826389-ad\"><div class=\"kt-accordion-header-wrap\"><button class=\"kt-blocks-accordion-header kt-acccordion-button-label-show\" type=\"button\"><span class=\"kt-blocks-accordion-title-wrap\"><span class=\"kt-blocks-accordion-title\">How do I choose the right chiller for a photolithography system?<\/span><\/span><span class=\"kt-blocks-accordion-icon-trigger\"><\/span><\/button><\/div><div class=\"kt-accordion-panel kt-accordion-panel-hidden\"><div class=\"kt-accordion-panel-inner\"><style>.wp-block-kadence-advancedheading.kt-adv-heading17105_709a03-47, .wp-block-kadence-advancedheading.kt-adv-heading17105_709a03-47[data-kb-block=\"kb-adv-heading17105_709a03-47\"]{font-size:18px;font-weight:400;font-style:normal;font-family:Mulish;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading17105_709a03-47 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_709a03-47[data-kb-block=\"kb-adv-heading17105_709a03-47\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_709a03-47 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_709a03-47[data-kb-block=\"kb-adv-heading17105_709a03-47\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading17105_709a03-47 wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading17105_709a03-47\">Key selection criteria include temperature stability, cooling capacity, fluid compatibility, response time, and integration options such as remote monitoring, alarms, and facility communication protocols.<\/p>\n<\/div><\/div><\/div>\n<\/div><\/div><\/div>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n<\/div>\n<\/div><div class=\"layout_badh\"><\/div><\/section>\n\n\n\n<section class=\"wp-block-themepark-block-themepark-area block_layout thempark-block undefined\" id=\"\" style=\"background-color:#fcfcfc;\" data-swiper-parallax=\"-700\"><div class=\"block_layout_in\" style=\"max-width:900px;\">\n<div class=\"wp-block-column block_layout_in is-layout-flow wp-block-column-is-layout-flow\"><style>.wp-block-kadence-advancedheading.kt-adv-heading17105_04bbcc-af, .wp-block-kadence-advancedheading.kt-adv-heading17105_04bbcc-af[data-kb-block=\"kb-adv-heading17105_04bbcc-af\"]{text-align:center;font-size:40px;font-weight:600;font-style:normal;font-family:Poppins;}.wp-block-kadence-advancedheading.kt-adv-heading17105_04bbcc-af mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_04bbcc-af[data-kb-block=\"kb-adv-heading17105_04bbcc-af\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_04bbcc-af img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_04bbcc-af[data-kb-block=\"kb-adv-heading17105_04bbcc-af\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<h2 class=\"kt-adv-heading17105_04bbcc-af wp-block-kadence-advancedheading has-black-color has-text-color\" data-kb-block=\"kb-adv-heading17105_04bbcc-af\">Recent Blogs<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<ul style=\"font-size:18px;font-style:normal;font-weight:500\" class=\"wp-block-latest-posts__list has-dates has-link-color wp-elements-5fbae2ef624f19684b6a5925aba73460 wp-block-latest-posts has-text-color has-themecolor-1-color\"><li><a class=\"wp-block-latest-posts__post-title\" href=\"https:\/\/tw.lneya.com\/ru\/blog\/clean-room-temperature-control.html\">Clean Room Temperature Control<\/a><time datetime=\"2026-07-10T14:50:14+08:00\" class=\"wp-block-latest-posts__post-date\">2026-07-10<\/time><\/li>\n<li><a class=\"wp-block-latest-posts__post-title\" href=\"https:\/\/tw.lneya.com\/ru\/blog\/data-center-cooling-system.html\">Data Center Cooling System<\/a><time datetime=\"2026-07-09T15:05:10+08:00\" class=\"wp-block-latest-posts__post-date\">2026-07-09<\/time><\/li>\n<li><a class=\"wp-block-latest-posts__post-title\" href=\"https:\/\/tw.lneya.com\/ru\/blog\/power-electronics-cooling.html\">Power Electronics Cooling<\/a><time datetime=\"2026-07-08T14:57:11+08:00\" class=\"wp-block-latest-posts__post-date\">2026-07-08<\/time><\/li>\n<li><a class=\"wp-block-latest-posts__post-title\" href=\"https:\/\/tw.lneya.com\/ru\/blog\/feedback-control-system.html\">Feedback Control System<\/a><time datetime=\"2026-07-07T09:38:07+08:00\" class=\"wp-block-latest-posts__post-date\">2026-07-07<\/time><\/li>\n<li><a class=\"wp-block-latest-posts__post-title\" href=\"https:\/\/tw.lneya.com\/ru\/blog\/electronic-expansion-valve.html\">Electronic Expansion Valve<\/a><time datetime=\"2026-07-06T15:53:00+08:00\" class=\"wp-block-latest-posts__post-date\">2026-07-06<\/time><\/li>\n<li><a class=\"wp-block-latest-posts__post-title\" href=\"https:\/\/tw.lneya.com\/ru\/blog\/r32-vs-r410a.html\">R32 vs R410A<\/a><time datetime=\"2026-07-03T16:14:58+08:00\" class=\"wp-block-latest-posts__post-date\">2026-07-03<\/time><\/li>\n<li><a class=\"wp-block-latest-posts__post-title\" href=\"https:\/\/tw.lneya.com\/ru\/blog\/semiconductor-manufacturing.html\">Semiconductor Manufacturing<\/a><time datetime=\"2026-07-03T15:22:04+08:00\" class=\"wp-block-latest-posts__post-date\">2026-07-03<\/time><\/li>\n<li><a class=\"wp-block-latest-posts__post-title\" href=\"https:\/\/tw.lneya.com\/ru\/blog\/refrigerated-circulator.html\">Refrigerated Circulator<\/a><time datetime=\"2026-07-02T16:43:06+08:00\" class=\"wp-block-latest-posts__post-date\">2026-07-02<\/time><\/li>\n<\/ul>\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedbtn.kb-btns17105_cb6649-9c{gap:var(--global-kb-gap-xs, 0.5rem );justify-content:center;align-items:center;}.kt-btns17105_cb6649-9c .kt-button{font-weight:normal;font-style:normal;}.kt-btns17105_cb6649-9c .kt-btn-wrap-0{margin-right:5px;}.wp-block-kadence-advancedbtn.kt-btns17105_cb6649-9c .kt-btn-wrap-0 .kt-button{color:#555555;border-color:#555555;}.wp-block-kadence-advancedbtn.kt-btns17105_cb6649-9c .kt-btn-wrap-0 .kt-button:hover, .wp-block-kadence-advancedbtn.kt-btns17105_cb6649-9c .kt-btn-wrap-0 .kt-button:focus{color:#ffffff;border-color:#444444;}.wp-block-kadence-advancedbtn.kt-btns17105_cb6649-9c .kt-btn-wrap-0 .kt-button::before{display:none;}.wp-block-kadence-advancedbtn.kt-btns17105_cb6649-9c .kt-btn-wrap-0 .kt-button:hover, .wp-block-kadence-advancedbtn.kt-btns17105_cb6649-9c .kt-btn-wrap-0 .kt-button:focus{background:#444444;}<\/style>\n<div class=\"wp-block-kadence-advancedbtn kb-buttons-wrap kb-btns17105_cb6649-9c\"><style>ul.menu .wp-block-kadence-advancedbtn .kb-btn17105_170b31-ad.kb-button{width:initial;}.wp-block-kadence-advancedbtn .kb-btn17105_170b31-ad.kb-button{color:#2a619b;font-family:Arial, Helvetica, sans-serif;font-weight:400;border-top-color:#2a619b;border-top-style:solid;border-right-color:#2a619b;border-right-style:solid;border-bottom-color:#2a619b;border-bottom-style:solid;border-left-color:#2a619b;border-left-style:solid;}@media all and (max-width: 1024px){.wp-block-kadence-advancedbtn .kb-btn17105_170b31-ad.kb-button{border-top-color:#2a619b;border-top-style:solid;border-right-color:#2a619b;border-right-style:solid;border-bottom-color:#2a619b;border-bottom-style:solid;border-left-color:#2a619b;border-left-style:solid;}}@media all and (max-width: 767px){.wp-block-kadence-advancedbtn .kb-btn17105_170b31-ad.kb-button{border-top-color:#2a619b;border-top-style:solid;border-right-color:#2a619b;border-right-style:solid;border-bottom-color:#2a619b;border-bottom-style:solid;border-left-color:#2a619b;border-left-style:solid;}}<\/style><a class=\"kb-button kt-button button kb-btn17105_170b31-ad kt-btn-size-large kt-btn-width-type-auto kb-btn-global-outline kt-btn-has-text-true kt-btn-has-svg-false wp-block-kadence-singlebtn\" href=\"https:\/\/tw.lneya.com\/blog\"><span class=\"kt-btn-inner-text\">Read More     ><\/span><\/a><\/div>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n<\/div>\n<\/div><div class=\"layout_badh\"><\/div><\/section>\n\n\n<style>.kadence-column17105_fd1cc4-83 > .kt-inside-inner-col,.kadence-column17105_fd1cc4-83 > .kt-inside-inner-col:before{border-top-left-radius:0px;border-top-right-radius:0px;border-bottom-right-radius:0px;border-bottom-left-radius:0px;}.kadence-column17105_fd1cc4-83 > .kt-inside-inner-col{column-gap:var(--global-kb-gap-sm, 1rem);}.kadence-column17105_fd1cc4-83 > .kt-inside-inner-col{flex-direction:column;}.kadence-column17105_fd1cc4-83 > .kt-inside-inner-col > .aligncenter{width:100%;}.kadence-column17105_fd1cc4-83 > .kt-inside-inner-col:before{opacity:0.3;}.kadence-column17105_fd1cc4-83{position:relative;}@media all and (max-width: 1024px){.kadence-column17105_fd1cc4-83 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}@media all and (max-width: 767px){.kadence-column17105_fd1cc4-83 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}<\/style>\n<div class=\"wp-block-kadence-column kadence-column17105_fd1cc4-83\"><div class=\"kt-inside-inner-col\">\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_452213-89, .wp-block-kadence-advancedheading.kt-adv-heading17105_452213-89[data-kb-block=\"kb-adv-heading17105_452213-89\"]{text-align:center;font-size:40px;font-weight:600;font-style:normal;font-family:Poppins;}.wp-block-kadence-advancedheading.kt-adv-heading17105_452213-89 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_452213-89[data-kb-block=\"kb-adv-heading17105_452213-89\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_452213-89 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_452213-89[data-kb-block=\"kb-adv-heading17105_452213-89\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<h2 class=\"kt-adv-heading17105_452213-89 wp-block-kadence-advancedheading has-black-color has-text-color\" data-kb-block=\"kb-adv-heading17105_452213-89\">Related Chillers<\/h2>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n<style>.kadence-column17105_499202-26 > .kt-inside-inner-col,.kadence-column17105_499202-26 > .kt-inside-inner-col:before{border-top-left-radius:0px;border-top-right-radius:0px;border-bottom-right-radius:0px;border-bottom-left-radius:0px;}.kadence-column17105_499202-26 > .kt-inside-inner-col{column-gap:var(--global-kb-gap-sm, 1rem);}.kadence-column17105_499202-26 > .kt-inside-inner-col{flex-direction:column;}.kadence-column17105_499202-26 > .kt-inside-inner-col > .aligncenter{width:100%;}.kadence-column17105_499202-26 > .kt-inside-inner-col:before{opacity:0.3;}.kadence-column17105_499202-26{position:relative;}@media all and (max-width: 1024px){.kadence-column17105_499202-26 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}@media all and (max-width: 767px){.kadence-column17105_499202-26 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}<\/style>\n<div class=\"wp-block-kadence-column kadence-column17105_499202-26\"><div class=\"kt-inside-inner-col\"><style>.kb-row-layout-id17105_5fb197-18 > .kt-row-column-wrap{align-content:start;}:where(.kb-row-layout-id17105_5fb197-18 > .kt-row-column-wrap) > .wp-block-kadence-column{justify-content:start;}.kb-row-layout-id17105_5fb197-18 > .kt-row-column-wrap{column-gap:var(--global-kb-gap-md, 2rem);row-gap:var(--global-kb-gap-md, 2rem);padding-top:var(--global-kb-spacing-sm, 1.5rem);padding-bottom:var(--global-kb-spacing-sm, 1.5rem);grid-template-columns:repeat(2, minmax(0, 1fr));}.kb-row-layout-id17105_5fb197-18 > .kt-row-layout-overlay{opacity:0.30;}@media all and (max-width: 1024px){.kb-row-layout-id17105_5fb197-18 > .kt-row-column-wrap{grid-template-columns:repeat(2, minmax(0, 1fr));}}@media all and (max-width: 767px){.kb-row-layout-id17105_5fb197-18 > .kt-row-column-wrap{grid-template-columns:minmax(0, 1fr);}}<\/style><div class=\"kb-row-layout-wrap kb-row-layout-id17105_5fb197-18 alignnone wp-block-kadence-rowlayout\"><div class=\"kt-row-column-wrap kt-has-2-columns kt-row-layout-equal kt-tab-layout-inherit kt-mobile-layout-row kt-row-valign-top\">\n<style>.kadence-column17105_61fb15-cd > .kt-inside-inner-col,.kadence-column17105_61fb15-cd > .kt-inside-inner-col:before{border-top-left-radius:0px;border-top-right-radius:0px;border-bottom-right-radius:0px;border-bottom-left-radius:0px;}.kadence-column17105_61fb15-cd > .kt-inside-inner-col{column-gap:var(--global-kb-gap-sm, 1rem);}.kadence-column17105_61fb15-cd > .kt-inside-inner-col{flex-direction:column;}.kadence-column17105_61fb15-cd > .kt-inside-inner-col > .aligncenter{width:100%;}.kadence-column17105_61fb15-cd > .kt-inside-inner-col{background-color:var(--global-palette8, #F7FAFC);}.kadence-column17105_61fb15-cd > .kt-inside-inner-col:before{opacity:0.3;}.kadence-column17105_61fb15-cd{position:relative;}@media all and (max-width: 1024px){.kadence-column17105_61fb15-cd > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}@media all and (max-width: 767px){.kadence-column17105_61fb15-cd > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}<\/style>\n<div class=\"wp-block-kadence-column kadence-column17105_61fb15-cd kb-section-has-link\"><div class=\"kt-inside-inner-col\"><style>.wp-block-kadence-image.kb-image17105_772de4-d0:not(.kb-specificity-added):not(.kb-extra-specificity-added){margin-bottom:0px;}.kb-image17105_772de4-d0.kb-image-is-ratio-size, .kb-image17105_772de4-d0 .kb-image-is-ratio-size{max-width:315px;width:100%;}.wp-block-kadence-column > .kt-inside-inner-col > .kb-image17105_772de4-d0.kb-image-is-ratio-size, .wp-block-kadence-column > .kt-inside-inner-col > .kb-image17105_772de4-d0 .kb-image-is-ratio-size{align-self:unset;}.kb-image17105_772de4-d0 figure{max-width:315px;}.kb-image17105_772de4-d0 .image-is-svg, .kb-image17105_772de4-d0 .image-is-svg img{width:100%;}.kb-image17105_772de4-d0:not(.kb-image-is-ratio-size) .kb-img, .kb-image17105_772de4-d0.kb-image-is-ratio-size{padding-bottom:0px;}.kb-image17105_772de4-d0 .kb-image-has-overlay:after{opacity:0.3;}.kb-image17105_772de4-d0 img.kb-img, .kb-image17105_772de4-d0 .kb-img img{object-position:0% 0%;}<\/style>\n<div class=\"wp-block-kadence-image kb-image17105_772de4-d0\"><figure class=\"aligncenter size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"450\" height=\"300\" src=\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/06\/LTZ9.png\" alt=\"LTZ9 chiller\" class=\"kb-img wp-image-14027\" srcset=\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/06\/LTZ9.png 450w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/06\/LTZ9-300x200.png 300w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/06\/LTZ9-18x12.png 18w\" sizes=\"auto, (max-width: 450px) 100vw, 450px\" \/><\/figure><\/div>\n\n\n<style>.kadence-column17105_79e108-41 > .kt-inside-inner-col{display:flex;}.kadence-column17105_79e108-41 > .kt-inside-inner-col{padding-top:var(--global-kb-spacing-md, 2rem);padding-right:var(--global-kb-spacing-md, 2rem);padding-bottom:var(--global-kb-spacing-md, 2rem);padding-left:var(--global-kb-spacing-md, 2rem);}.kadence-column17105_79e108-41 > .kt-inside-inner-col,.kadence-column17105_79e108-41 > .kt-inside-inner-col:before{border-top-left-radius:0px;border-top-right-radius:0px;border-bottom-right-radius:0px;border-bottom-left-radius:0px;}.kadence-column17105_79e108-41 > .kt-inside-inner-col{column-gap:var(--global-kb-gap-sm, 1rem);}.kadence-column17105_79e108-41 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}.kadence-column17105_79e108-41 > .kt-inside-inner-col > .aligncenter{width:100%;}.kt-row-column-wrap > .kadence-column17105_79e108-41{align-self:center;}.kt-inner-column-height-full:not(.kt-has-1-columns) > .wp-block-kadence-column.kadence-column17105_79e108-41{align-self:auto;}.kt-inner-column-height-full:not(.kt-has-1-columns) > .wp-block-kadence-column.kadence-column17105_79e108-41 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}.kadence-column17105_79e108-41 > .kt-inside-inner-col:before{opacity:0.3;}.kadence-column17105_79e108-41{position:relative;}@media all and (max-width: 1024px){.kt-row-column-wrap > .kadence-column17105_79e108-41{align-self:center;}}@media all and (max-width: 1024px){.kt-inner-column-height-full:not(.kt-has-1-columns) > .wp-block-kadence-column.kadence-column17105_79e108-41{align-self:auto;}}@media all and (max-width: 1024px){.kt-inner-column-height-full:not(.kt-has-1-columns) > .wp-block-kadence-column.kadence-column17105_79e108-41 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}@media all and (max-width: 1024px){.kadence-column17105_79e108-41 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}@media all and (max-width: 767px){.kt-row-column-wrap > .kadence-column17105_79e108-41{align-self:center;}.kt-inner-column-height-full:not(.kt-has-1-columns) > .wp-block-kadence-column.kadence-column17105_79e108-41{align-self:auto;}.kt-inner-column-height-full:not(.kt-has-1-columns) > .wp-block-kadence-column.kadence-column17105_79e108-41 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}.kadence-column17105_79e108-41 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}<\/style>\n<div class=\"wp-block-kadence-column kadence-column17105_79e108-41\"><div class=\"kt-inside-inner-col\"><style>.wp-block-kadence-advancedheading.kt-adv-heading17105_924746-bd, .wp-block-kadence-advancedheading.kt-adv-heading17105_924746-bd[data-kb-block=\"kb-adv-heading17105_924746-bd\"]{text-align:center;font-size:20px;font-weight:600;font-style:normal;font-family:Poppins;}.wp-block-kadence-advancedheading.kt-adv-heading17105_924746-bd mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_924746-bd[data-kb-block=\"kb-adv-heading17105_924746-bd\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_924746-bd img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_924746-bd[data-kb-block=\"kb-adv-heading17105_924746-bd\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading17105_924746-bd wp-block-kadence-advancedheading has-themecolor-1-color has-text-color\" data-kb-block=\"kb-adv-heading17105_924746-bd\">LT -30\u2103~90\u2103<br>recirculating chillers<\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_02efc2-6e, .wp-block-kadence-advancedheading.kt-adv-heading17105_02efc2-6e[data-kb-block=\"kb-adv-heading17105_02efc2-6e\"]{text-align:center;font-size:16px;font-weight:400;font-style:normal;font-family:Poppins;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading17105_02efc2-6e mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_02efc2-6e[data-kb-block=\"kb-adv-heading17105_02efc2-6e\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_02efc2-6e img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_02efc2-6e[data-kb-block=\"kb-adv-heading17105_02efc2-6e\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading17105_02efc2-6e wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading17105_02efc2-6e\">Cooling capacity 0.4KW~14KW;<br>Temp accuracy \u00b10.5\u2103<\/p>\n<\/div><\/div>\n<\/div><a href=\"https:\/\/tw.lneya.com\/recirculating-chillers\" class=\"kb-section-link-overlay\" target=\"_blank\" rel=\"noopener noreferrer\"><\/a><\/div>\n\n\n<style>.kadence-column17105_8a3389-34 > .kt-inside-inner-col,.kadence-column17105_8a3389-34 > .kt-inside-inner-col:before{border-top-left-radius:0px;border-top-right-radius:0px;border-bottom-right-radius:0px;border-bottom-left-radius:0px;}.kadence-column17105_8a3389-34 > .kt-inside-inner-col{column-gap:var(--global-kb-gap-sm, 1rem);}.kadence-column17105_8a3389-34 > .kt-inside-inner-col{flex-direction:column;}.kadence-column17105_8a3389-34 > .kt-inside-inner-col > .aligncenter{width:100%;}.kadence-column17105_8a3389-34 > .kt-inside-inner-col{background-color:var(--global-palette8, #F7FAFC);}.kadence-column17105_8a3389-34 > .kt-inside-inner-col:before{opacity:0.3;}.kadence-column17105_8a3389-34{position:relative;}@media all and (max-width: 1024px){.kadence-column17105_8a3389-34 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}@media all and (max-width: 767px){.kadence-column17105_8a3389-34 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}<\/style>\n<div class=\"wp-block-kadence-column kadence-column17105_8a3389-34 kb-section-has-link\"><div class=\"kt-inside-inner-col\"><style>.kadence-column17105_24ad7b-4f > .kt-inside-inner-col,.kadence-column17105_24ad7b-4f > .kt-inside-inner-col:before{border-top-left-radius:0px;border-top-right-radius:0px;border-bottom-right-radius:0px;border-bottom-left-radius:0px;}.kadence-column17105_24ad7b-4f > .kt-inside-inner-col{column-gap:var(--global-kb-gap-sm, 1rem);}.kadence-column17105_24ad7b-4f > .kt-inside-inner-col{flex-direction:column;}.kadence-column17105_24ad7b-4f > .kt-inside-inner-col > .aligncenter{width:100%;}.kadence-column17105_24ad7b-4f > .kt-inside-inner-col{background-color:var(--global-palette8, #F7FAFC);}.kadence-column17105_24ad7b-4f > .kt-inside-inner-col:before{opacity:0.3;}.kadence-column17105_24ad7b-4f{position:relative;}@media all and (max-width: 1024px){.kadence-column17105_24ad7b-4f > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}@media all and (max-width: 767px){.kadence-column17105_24ad7b-4f > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}<\/style>\n<div class=\"wp-block-kadence-column kadence-column17105_24ad7b-4f\"><div class=\"kt-inside-inner-col\"><style>.wp-block-kadence-image.kb-image17105_e56956-20:not(.kb-specificity-added):not(.kb-extra-specificity-added){margin-bottom:0px;}.kb-image17105_e56956-20.kb-image-is-ratio-size, .kb-image17105_e56956-20 .kb-image-is-ratio-size{max-width:191px;width:100%;}.wp-block-kadence-column > .kt-inside-inner-col > .kb-image17105_e56956-20.kb-image-is-ratio-size, .wp-block-kadence-column > .kt-inside-inner-col > .kb-image17105_e56956-20 .kb-image-is-ratio-size{align-self:unset;}.kb-image17105_e56956-20 figure{max-width:191px;}.kb-image17105_e56956-20 .image-is-svg, .kb-image17105_e56956-20 .image-is-svg img{width:100%;}.kb-image17105_e56956-20:not(.kb-image-is-ratio-size) .kb-img, .kb-image17105_e56956-20.kb-image-is-ratio-size{padding-bottom:0px;}.kb-image17105_e56956-20 .kb-image-has-overlay:after{opacity:0.3;}.kb-image17105_e56956-20 img.kb-img, .kb-image17105_e56956-20 .kb-img img{object-position:0% 0%;}<\/style>\n<div class=\"wp-block-kadence-image kb-image17105_e56956-20\"><figure class=\"aligncenter size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"450\" height=\"496\" src=\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/05\/FLTZ-SINGLE-CHANNEL-CHILLER-e1749711591853.png\" alt=\"water cooled chiller\" class=\"kb-img wp-image-13911\"\/><\/figure><\/div>\n\n\n<style>.kadence-column17105_620fda-8a > .kt-inside-inner-col{display:flex;}.kadence-column17105_620fda-8a > .kt-inside-inner-col{padding-top:var(--global-kb-spacing-md, 2rem);padding-right:var(--global-kb-spacing-md, 2rem);padding-bottom:var(--global-kb-spacing-md, 2rem);padding-left:var(--global-kb-spacing-md, 2rem);}.kadence-column17105_620fda-8a > .kt-inside-inner-col,.kadence-column17105_620fda-8a > .kt-inside-inner-col:before{border-top-left-radius:0px;border-top-right-radius:0px;border-bottom-right-radius:0px;border-bottom-left-radius:0px;}.kadence-column17105_620fda-8a > .kt-inside-inner-col{column-gap:var(--global-kb-gap-sm, 1rem);}.kadence-column17105_620fda-8a > .kt-inside-inner-col{flex-direction:column;justify-content:center;}.kadence-column17105_620fda-8a > .kt-inside-inner-col > .aligncenter{width:100%;}.kt-row-column-wrap > .kadence-column17105_620fda-8a{align-self:center;}.kt-inner-column-height-full:not(.kt-has-1-columns) > .wp-block-kadence-column.kadence-column17105_620fda-8a{align-self:auto;}.kt-inner-column-height-full:not(.kt-has-1-columns) > .wp-block-kadence-column.kadence-column17105_620fda-8a > .kt-inside-inner-col{flex-direction:column;justify-content:center;}.kadence-column17105_620fda-8a > .kt-inside-inner-col:before{opacity:0.3;}.kadence-column17105_620fda-8a{position:relative;}@media all and (max-width: 1024px){.kt-row-column-wrap > .kadence-column17105_620fda-8a{align-self:center;}}@media all and (max-width: 1024px){.kt-inner-column-height-full:not(.kt-has-1-columns) > .wp-block-kadence-column.kadence-column17105_620fda-8a{align-self:auto;}}@media all and (max-width: 1024px){.kt-inner-column-height-full:not(.kt-has-1-columns) > .wp-block-kadence-column.kadence-column17105_620fda-8a > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}@media all and (max-width: 1024px){.kadence-column17105_620fda-8a > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}@media all and (max-width: 767px){.kt-row-column-wrap > .kadence-column17105_620fda-8a{align-self:center;}.kt-inner-column-height-full:not(.kt-has-1-columns) > .wp-block-kadence-column.kadence-column17105_620fda-8a{align-self:auto;}.kt-inner-column-height-full:not(.kt-has-1-columns) > .wp-block-kadence-column.kadence-column17105_620fda-8a > .kt-inside-inner-col{flex-direction:column;justify-content:center;}.kadence-column17105_620fda-8a > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}<\/style>\n<div class=\"wp-block-kadence-column kadence-column17105_620fda-8a\"><div class=\"kt-inside-inner-col\"><style>.wp-block-kadence-advancedheading.kt-adv-heading17105_c3527a-15, .wp-block-kadence-advancedheading.kt-adv-heading17105_c3527a-15[data-kb-block=\"kb-adv-heading17105_c3527a-15\"]{text-align:center;font-size:20px;font-weight:600;font-style:normal;font-family:Poppins;}.wp-block-kadence-advancedheading.kt-adv-heading17105_c3527a-15 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_c3527a-15[data-kb-block=\"kb-adv-heading17105_c3527a-15\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_c3527a-15 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_c3527a-15[data-kb-block=\"kb-adv-heading17105_c3527a-15\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading17105_c3527a-15 wp-block-kadence-advancedheading has-themecolor-1-color has-text-color\" data-kb-block=\"kb-adv-heading17105_c3527a-15\">FLTZ -100\u2103~90\u2103<br>semiconductor chillers<\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_6c4fa8-8b, .wp-block-kadence-advancedheading.kt-adv-heading17105_6c4fa8-8b[data-kb-block=\"kb-adv-heading17105_6c4fa8-8b\"]{text-align:center;font-size:16px;font-weight:400;font-style:normal;font-family:Poppins;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading17105_6c4fa8-8b mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_6c4fa8-8b[data-kb-block=\"kb-adv-heading17105_6c4fa8-8b\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_6c4fa8-8b img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_6c4fa8-8b[data-kb-block=\"kb-adv-heading17105_6c4fa8-8b\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading17105_6c4fa8-8b wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading17105_6c4fa8-8b\">Cooling capacity 1KW~40KW<br>Temp accuracy \u00b10.1\u2103<\/p>\n<\/div><\/div>\n<\/div><\/div>\n<\/div><a href=\"https:\/\/tw.lneya.com\/semiconductor-chillers\" class=\"kb-section-link-overlay\" target=\"_blank\" rel=\"noopener noreferrer\"><\/a><\/div>\n\n<\/div><\/div>\n\n<style>.kb-row-layout-id17105_da4d26-fd > .kt-row-column-wrap{align-content:start;}:where(.kb-row-layout-id17105_da4d26-fd > .kt-row-column-wrap) > .wp-block-kadence-column{justify-content:start;}.kb-row-layout-id17105_da4d26-fd > .kt-row-column-wrap{column-gap:var(--global-kb-gap-md, 2rem);row-gap:var(--global-kb-gap-md, 2rem);padding-top:var(--global-kb-spacing-sm, 1.5rem);padding-bottom:var(--global-kb-spacing-sm, 1.5rem);grid-template-columns:repeat(2, minmax(0, 1fr));}.kb-row-layout-id17105_da4d26-fd > .kt-row-layout-overlay{opacity:0.30;}@media all and (max-width: 1024px){.kb-row-layout-id17105_da4d26-fd > .kt-row-column-wrap{grid-template-columns:repeat(2, minmax(0, 1fr));}}@media all and (max-width: 767px){.kb-row-layout-id17105_da4d26-fd > .kt-row-column-wrap{grid-template-columns:minmax(0, 1fr);}}<\/style><div class=\"kb-row-layout-wrap kb-row-layout-id17105_da4d26-fd alignnone wp-block-kadence-rowlayout\"><div class=\"kt-row-column-wrap kt-has-2-columns kt-row-layout-equal kt-tab-layout-inherit kt-mobile-layout-row kt-row-valign-top\">\n<style>.kadence-column17105_89be06-3f > .kt-inside-inner-col,.kadence-column17105_89be06-3f > .kt-inside-inner-col:before{border-top-left-radius:0px;border-top-right-radius:0px;border-bottom-right-radius:0px;border-bottom-left-radius:0px;}.kadence-column17105_89be06-3f > .kt-inside-inner-col{column-gap:var(--global-kb-gap-sm, 1rem);}.kadence-column17105_89be06-3f > .kt-inside-inner-col{flex-direction:column;}.kadence-column17105_89be06-3f > .kt-inside-inner-col > .aligncenter{width:100%;}.kadence-column17105_89be06-3f > .kt-inside-inner-col{background-color:var(--global-palette8, #F7FAFC);}.kadence-column17105_89be06-3f > .kt-inside-inner-col:before{opacity:0.3;}.kadence-column17105_89be06-3f{position:relative;}@media all and (max-width: 1024px){.kadence-column17105_89be06-3f > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}@media all and (max-width: 767px){.kadence-column17105_89be06-3f > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}<\/style>\n<div class=\"wp-block-kadence-column kadence-column17105_89be06-3f kb-section-has-link\"><div class=\"kt-inside-inner-col\"><style>.kadence-column17105_0b53ab-6f > .kt-inside-inner-col,.kadence-column17105_0b53ab-6f > .kt-inside-inner-col:before{border-top-left-radius:0px;border-top-right-radius:0px;border-bottom-right-radius:0px;border-bottom-left-radius:0px;}.kadence-column17105_0b53ab-6f > .kt-inside-inner-col{column-gap:var(--global-kb-gap-sm, 1rem);}.kadence-column17105_0b53ab-6f > .kt-inside-inner-col{flex-direction:column;}.kadence-column17105_0b53ab-6f > .kt-inside-inner-col > .aligncenter{width:100%;}.kadence-column17105_0b53ab-6f > .kt-inside-inner-col{background-color:var(--global-palette8, #F7FAFC);}.kadence-column17105_0b53ab-6f > .kt-inside-inner-col:before{opacity:0.3;}.kadence-column17105_0b53ab-6f{position:relative;}@media all and (max-width: 1024px){.kadence-column17105_0b53ab-6f > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}@media all and (max-width: 767px){.kadence-column17105_0b53ab-6f > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}<\/style>\n<div class=\"wp-block-kadence-column kadence-column17105_0b53ab-6f\"><div class=\"kt-inside-inner-col\"><style>.kadence-column17105_2b02ab-7a > .kt-inside-inner-col,.kadence-column17105_2b02ab-7a > .kt-inside-inner-col:before{border-top-left-radius:0px;border-top-right-radius:0px;border-bottom-right-radius:0px;border-bottom-left-radius:0px;}.kadence-column17105_2b02ab-7a > .kt-inside-inner-col{column-gap:var(--global-kb-gap-sm, 1rem);}.kadence-column17105_2b02ab-7a > .kt-inside-inner-col{flex-direction:column;}.kadence-column17105_2b02ab-7a > .kt-inside-inner-col > .aligncenter{width:100%;}.kadence-column17105_2b02ab-7a > .kt-inside-inner-col{background-color:var(--global-palette8, #F7FAFC);}.kadence-column17105_2b02ab-7a > .kt-inside-inner-col:before{opacity:0.3;}.kadence-column17105_2b02ab-7a{position:relative;}@media all and (max-width: 1024px){.kadence-column17105_2b02ab-7a > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}@media all and (max-width: 767px){.kadence-column17105_2b02ab-7a > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}<\/style>\n<div class=\"wp-block-kadence-column kadence-column17105_2b02ab-7a\"><div class=\"kt-inside-inner-col\"><style>.wp-block-kadence-image.kb-image17105_d385bc-32:not(.kb-specificity-added):not(.kb-extra-specificity-added){margin-bottom:0px;}.kb-image17105_d385bc-32.kb-image-is-ratio-size, .kb-image17105_d385bc-32 .kb-image-is-ratio-size{max-width:268px;width:100%;}.wp-block-kadence-column > .kt-inside-inner-col > .kb-image17105_d385bc-32.kb-image-is-ratio-size, .wp-block-kadence-column > .kt-inside-inner-col > .kb-image17105_d385bc-32 .kb-image-is-ratio-size{align-self:unset;}.kb-image17105_d385bc-32 figure{max-width:268px;}.kb-image17105_d385bc-32 .image-is-svg, .kb-image17105_d385bc-32 .image-is-svg img{width:100%;}.kb-image17105_d385bc-32:not(.kb-image-is-ratio-size) .kb-img, .kb-image17105_d385bc-32.kb-image-is-ratio-size{padding-bottom:0px;}.kb-image17105_d385bc-32 .kb-image-has-overlay:after{opacity:0.3;}.kb-image17105_d385bc-32 img.kb-img, .kb-image17105_d385bc-32 .kb-img img{object-position:0% 0%;}<\/style>\n<div class=\"wp-block-kadence-image kb-image17105_d385bc-32\"><figure class=\"aligncenter size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"870\" height=\"630\" src=\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/LG5.png\" alt=\"LG-screw-chillers\" class=\"kb-img wp-image-13431\" srcset=\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/LG5.png 870w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/LG5-300x217.png 300w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/LG5-768x556.png 768w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/04\/LG5-18x12.png 18w\" sizes=\"auto, (max-width: 870px) 100vw, 870px\" \/><\/figure><\/div>\n\n\n<style>.kadence-column17105_1c8648-a7 > .kt-inside-inner-col{padding-top:var(--global-kb-spacing-md, 2rem);padding-right:var(--global-kb-spacing-md, 2rem);padding-bottom:var(--global-kb-spacing-md, 2rem);padding-left:var(--global-kb-spacing-md, 2rem);}.kadence-column17105_1c8648-a7 > .kt-inside-inner-col,.kadence-column17105_1c8648-a7 > .kt-inside-inner-col:before{border-top-left-radius:0px;border-top-right-radius:0px;border-bottom-right-radius:0px;border-bottom-left-radius:0px;}.kadence-column17105_1c8648-a7 > .kt-inside-inner-col{column-gap:var(--global-kb-gap-sm, 1rem);}.kadence-column17105_1c8648-a7 > .kt-inside-inner-col{flex-direction:column;}.kadence-column17105_1c8648-a7 > .kt-inside-inner-col > .aligncenter{width:100%;}.kadence-column17105_1c8648-a7 > .kt-inside-inner-col:before{opacity:0.3;}.kadence-column17105_1c8648-a7{position:relative;}@media all and (max-width: 1024px){.kadence-column17105_1c8648-a7 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}@media all and (max-width: 767px){.kadence-column17105_1c8648-a7 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}<\/style>\n<div class=\"wp-block-kadence-column kadence-column17105_1c8648-a7\"><div class=\"kt-inside-inner-col\"><style>.wp-block-kadence-advancedheading.kt-adv-heading17105_572e7b-cf, .wp-block-kadence-advancedheading.kt-adv-heading17105_572e7b-cf[data-kb-block=\"kb-adv-heading17105_572e7b-cf\"]{text-align:center;font-size:20px;font-weight:600;font-style:normal;font-family:Poppins;}.wp-block-kadence-advancedheading.kt-adv-heading17105_572e7b-cf mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_572e7b-cf[data-kb-block=\"kb-adv-heading17105_572e7b-cf\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_572e7b-cf img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_572e7b-cf[data-kb-block=\"kb-adv-heading17105_572e7b-cf\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading17105_572e7b-cf wp-block-kadence-advancedheading has-themecolor-1-color has-text-color\" data-kb-block=\"kb-adv-heading17105_572e7b-cf\">LG -115\u2103~-30\u2103<br>screw chillers<\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_fb8d71-d5, .wp-block-kadence-advancedheading.kt-adv-heading17105_fb8d71-d5[data-kb-block=\"kb-adv-heading17105_fb8d71-d5\"]{text-align:center;font-size:16px;font-weight:400;font-style:normal;font-family:Poppins;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading17105_fb8d71-d5 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_fb8d71-d5[data-kb-block=\"kb-adv-heading17105_fb8d71-d5\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_fb8d71-d5 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_fb8d71-d5[data-kb-block=\"kb-adv-heading17105_fb8d71-d5\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading17105_fb8d71-d5 wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading17105_fb8d71-d5\">Cooling capacity<br>9KW~936KW<\/p>\n<\/div><\/div>\n<\/div><\/div>\n<\/div><\/div>\n<\/div><a href=\"https:\/\/tw.lneya.com\/screw-chillers\" class=\"kb-section-link-overlay\" target=\"_blank\" rel=\"noopener noreferrer\"><\/a><\/div>\n\n\n<style>.kadence-column17105_4789f2-a0 > .kt-inside-inner-col,.kadence-column17105_4789f2-a0 > .kt-inside-inner-col:before{border-top-left-radius:0px;border-top-right-radius:0px;border-bottom-right-radius:0px;border-bottom-left-radius:0px;}.kadence-column17105_4789f2-a0 > .kt-inside-inner-col{column-gap:var(--global-kb-gap-sm, 1rem);}.kadence-column17105_4789f2-a0 > .kt-inside-inner-col{flex-direction:column;}.kadence-column17105_4789f2-a0 > .kt-inside-inner-col > .aligncenter{width:100%;}.kadence-column17105_4789f2-a0 > .kt-inside-inner-col{background-color:var(--global-palette8, #F7FAFC);}.kadence-column17105_4789f2-a0 > .kt-inside-inner-col:before{opacity:0.3;}.kadence-column17105_4789f2-a0{position:relative;}@media all and (max-width: 1024px){.kadence-column17105_4789f2-a0 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}@media all and (max-width: 767px){.kadence-column17105_4789f2-a0 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}<\/style>\n<div class=\"wp-block-kadence-column kadence-column17105_4789f2-a0 kb-section-has-link\"><div class=\"kt-inside-inner-col\"><style>.kadence-column17105_37a208-88 > .kt-inside-inner-col,.kadence-column17105_37a208-88 > .kt-inside-inner-col:before{border-top-left-radius:0px;border-top-right-radius:0px;border-bottom-right-radius:0px;border-bottom-left-radius:0px;}.kadence-column17105_37a208-88 > .kt-inside-inner-col{column-gap:var(--global-kb-gap-sm, 1rem);}.kadence-column17105_37a208-88 > .kt-inside-inner-col{flex-direction:column;}.kadence-column17105_37a208-88 > .kt-inside-inner-col > .aligncenter{width:100%;}.kadence-column17105_37a208-88 > .kt-inside-inner-col{background-color:var(--global-palette8, #F7FAFC);}.kadence-column17105_37a208-88 > .kt-inside-inner-col:before{opacity:0.3;}.kadence-column17105_37a208-88{position:relative;}@media all and (max-width: 1024px){.kadence-column17105_37a208-88 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}@media all and (max-width: 767px){.kadence-column17105_37a208-88 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}<\/style>\n<div class=\"wp-block-kadence-column kadence-column17105_37a208-88\"><div class=\"kt-inside-inner-col\"><style>.kadence-column17105_bfe499-45 > .kt-inside-inner-col,.kadence-column17105_bfe499-45 > .kt-inside-inner-col:before{border-top-left-radius:0px;border-top-right-radius:0px;border-bottom-right-radius:0px;border-bottom-left-radius:0px;}.kadence-column17105_bfe499-45 > .kt-inside-inner-col{column-gap:var(--global-kb-gap-sm, 1rem);}.kadence-column17105_bfe499-45 > .kt-inside-inner-col{flex-direction:column;}.kadence-column17105_bfe499-45 > .kt-inside-inner-col > .aligncenter{width:100%;}.kadence-column17105_bfe499-45 > .kt-inside-inner-col{background-color:var(--global-palette8, #F7FAFC);}.kadence-column17105_bfe499-45 > .kt-inside-inner-col:before{opacity:0.3;}.kadence-column17105_bfe499-45{position:relative;}@media all and (max-width: 1024px){.kadence-column17105_bfe499-45 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}@media all and (max-width: 767px){.kadence-column17105_bfe499-45 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}<\/style>\n<div class=\"wp-block-kadence-column kadence-column17105_bfe499-45\"><div class=\"kt-inside-inner-col\"><style>.wp-block-kadence-image.kb-image17105_165bfe-00:not(.kb-specificity-added):not(.kb-extra-specificity-added){margin-bottom:0px;}.kb-image17105_165bfe-00.kb-image-is-ratio-size, .kb-image17105_165bfe-00 .kb-image-is-ratio-size{max-width:271px;width:100%;}.wp-block-kadence-column > .kt-inside-inner-col > .kb-image17105_165bfe-00.kb-image-is-ratio-size, .wp-block-kadence-column > .kt-inside-inner-col > .kb-image17105_165bfe-00 .kb-image-is-ratio-size{align-self:unset;}.kb-image17105_165bfe-00 figure{max-width:271px;}.kb-image17105_165bfe-00 .image-is-svg, .kb-image17105_165bfe-00 .image-is-svg img{width:100%;}.kb-image17105_165bfe-00:not(.kb-image-is-ratio-size) .kb-img, .kb-image17105_165bfe-00.kb-image-is-ratio-size{padding-bottom:0px;}.kb-image17105_165bfe-00 .kb-image-has-overlay:after{opacity:0.3;}.kb-image17105_165bfe-00 img.kb-img, .kb-image17105_165bfe-00 .kb-img img{object-position:0% 0%;}<\/style>\n<div class=\"wp-block-kadence-image kb-image17105_165bfe-00\"><figure class=\"aligncenter size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"870\" height=\"630\" src=\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/01\/HLTZ-1.png\" alt=\"HLTZ freezer\" class=\"kb-img wp-image-11378\" srcset=\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/01\/HLTZ-1.png 870w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/01\/HLTZ-1-300x217.png 300w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/01\/HLTZ-1-768x556.png 768w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/01\/HLTZ-1-18x12.png 18w\" sizes=\"auto, (max-width: 870px) 100vw, 870px\" \/><\/figure><\/div>\n\n\n<style>.kadence-column17105_6f191a-8f > .kt-inside-inner-col{padding-top:var(--global-kb-spacing-md, 2rem);padding-right:var(--global-kb-spacing-md, 2rem);padding-bottom:var(--global-kb-spacing-md, 2rem);padding-left:var(--global-kb-spacing-md, 2rem);}.kadence-column17105_6f191a-8f > .kt-inside-inner-col,.kadence-column17105_6f191a-8f > .kt-inside-inner-col:before{border-top-left-radius:0px;border-top-right-radius:0px;border-bottom-right-radius:0px;border-bottom-left-radius:0px;}.kadence-column17105_6f191a-8f > .kt-inside-inner-col{column-gap:var(--global-kb-gap-sm, 1rem);}.kadence-column17105_6f191a-8f > .kt-inside-inner-col{flex-direction:column;}.kadence-column17105_6f191a-8f > .kt-inside-inner-col > .aligncenter{width:100%;}.kadence-column17105_6f191a-8f > .kt-inside-inner-col:before{opacity:0.3;}.kadence-column17105_6f191a-8f{position:relative;}@media all and (max-width: 1024px){.kadence-column17105_6f191a-8f > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}@media all and (max-width: 767px){.kadence-column17105_6f191a-8f > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}<\/style>\n<div class=\"wp-block-kadence-column kadence-column17105_6f191a-8f\"><div class=\"kt-inside-inner-col\"><style>.wp-block-kadence-advancedheading.kt-adv-heading17105_500cb0-42, .wp-block-kadence-advancedheading.kt-adv-heading17105_500cb0-42[data-kb-block=\"kb-adv-heading17105_500cb0-42\"]{text-align:center;font-size:20px;font-weight:600;font-style:normal;font-family:Poppins;}.wp-block-kadence-advancedheading.kt-adv-heading17105_500cb0-42 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_500cb0-42[data-kb-block=\"kb-adv-heading17105_500cb0-42\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_500cb0-42 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_500cb0-42[data-kb-block=\"kb-adv-heading17105_500cb0-42\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading17105_500cb0-42 wp-block-kadence-advancedheading has-themecolor-1-color has-text-color\" data-kb-block=\"kb-adv-heading17105_500cb0-42\">HLTZ -40\u2103~-30\u2103<br>hydrogen chillers<\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_4bb8f8-95, .wp-block-kadence-advancedheading.kt-adv-heading17105_4bb8f8-95[data-kb-block=\"kb-adv-heading17105_4bb8f8-95\"]{text-align:center;font-size:16px;font-weight:400;font-style:normal;font-family:Poppins;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading17105_4bb8f8-95 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_4bb8f8-95[data-kb-block=\"kb-adv-heading17105_4bb8f8-95\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_4bb8f8-95 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_4bb8f8-95[data-kb-block=\"kb-adv-heading17105_4bb8f8-95\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading17105_4bb8f8-95 wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading17105_4bb8f8-95\">Cooling capacity 4.5KW~40KW<br>Temp accuracy \u00b10.3\u2103<\/p>\n<\/div><\/div>\n<\/div><\/div>\n<\/div><\/div>\n<\/div><a href=\"https:\/\/tw.lneya.com\/hydrogen-chillers\" class=\"kb-section-link-overlay\" target=\"_blank\" rel=\"noopener noreferrer\"><\/a><\/div>\n\n<\/div><\/div>\n\n<style>.kb-row-layout-id17105_33a452-6f > .kt-row-column-wrap{align-content:start;}:where(.kb-row-layout-id17105_33a452-6f > .kt-row-column-wrap) > .wp-block-kadence-column{justify-content:start;}.kb-row-layout-id17105_33a452-6f > .kt-row-column-wrap{column-gap:var(--global-kb-gap-md, 2rem);row-gap:var(--global-kb-gap-md, 2rem);padding-top:var(--global-kb-spacing-sm, 1.5rem);padding-bottom:var(--global-kb-spacing-sm, 1.5rem);grid-template-columns:repeat(2, minmax(0, 1fr));}.kb-row-layout-id17105_33a452-6f > .kt-row-layout-overlay{opacity:0.30;}@media all and (max-width: 1024px){.kb-row-layout-id17105_33a452-6f > .kt-row-column-wrap{grid-template-columns:repeat(2, minmax(0, 1fr));}}@media all and (max-width: 767px){.kb-row-layout-id17105_33a452-6f > .kt-row-column-wrap{grid-template-columns:minmax(0, 1fr);}}<\/style><div class=\"kb-row-layout-wrap kb-row-layout-id17105_33a452-6f alignnone wp-block-kadence-rowlayout\"><div class=\"kt-row-column-wrap kt-has-2-columns kt-row-layout-equal kt-tab-layout-inherit kt-mobile-layout-row kt-row-valign-top\">\n<style>.kadence-column17105_e22a22-d6 > .kt-inside-inner-col,.kadence-column17105_e22a22-d6 > .kt-inside-inner-col:before{border-top-left-radius:0px;border-top-right-radius:0px;border-bottom-right-radius:0px;border-bottom-left-radius:0px;}.kadence-column17105_e22a22-d6 > .kt-inside-inner-col{column-gap:var(--global-kb-gap-sm, 1rem);}.kadence-column17105_e22a22-d6 > .kt-inside-inner-col{flex-direction:column;}.kadence-column17105_e22a22-d6 > .kt-inside-inner-col > .aligncenter{width:100%;}.kadence-column17105_e22a22-d6 > .kt-inside-inner-col{background-color:var(--global-palette8, #F7FAFC);}.kadence-column17105_e22a22-d6 > .kt-inside-inner-col:before{opacity:0.3;}.kadence-column17105_e22a22-d6{position:relative;}@media all and (max-width: 1024px){.kadence-column17105_e22a22-d6 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}@media all and (max-width: 767px){.kadence-column17105_e22a22-d6 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}<\/style>\n<div class=\"wp-block-kadence-column kadence-column17105_e22a22-d6 kb-section-has-link\"><div class=\"kt-inside-inner-col\"><style>.kadence-column17105_52b33a-e6 > .kt-inside-inner-col,.kadence-column17105_52b33a-e6 > .kt-inside-inner-col:before{border-top-left-radius:0px;border-top-right-radius:0px;border-bottom-right-radius:0px;border-bottom-left-radius:0px;}.kadence-column17105_52b33a-e6 > .kt-inside-inner-col{column-gap:var(--global-kb-gap-sm, 1rem);}.kadence-column17105_52b33a-e6 > .kt-inside-inner-col{flex-direction:column;}.kadence-column17105_52b33a-e6 > .kt-inside-inner-col > .aligncenter{width:100%;}.kadence-column17105_52b33a-e6 > .kt-inside-inner-col{background-color:var(--global-palette8, #F7FAFC);}.kadence-column17105_52b33a-e6 > .kt-inside-inner-col:before{opacity:0.3;}.kadence-column17105_52b33a-e6{position:relative;}@media all and (max-width: 1024px){.kadence-column17105_52b33a-e6 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}@media all and (max-width: 767px){.kadence-column17105_52b33a-e6 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}<\/style>\n<div class=\"wp-block-kadence-column kadence-column17105_52b33a-e6\"><div class=\"kt-inside-inner-col\"><style>.kadence-column17105_0564e1-79 > .kt-inside-inner-col,.kadence-column17105_0564e1-79 > .kt-inside-inner-col:before{border-top-left-radius:0px;border-top-right-radius:0px;border-bottom-right-radius:0px;border-bottom-left-radius:0px;}.kadence-column17105_0564e1-79 > .kt-inside-inner-col{column-gap:var(--global-kb-gap-sm, 1rem);}.kadence-column17105_0564e1-79 > .kt-inside-inner-col{flex-direction:column;}.kadence-column17105_0564e1-79 > .kt-inside-inner-col > .aligncenter{width:100%;}.kadence-column17105_0564e1-79 > .kt-inside-inner-col{background-color:var(--global-palette8, #F7FAFC);}.kadence-column17105_0564e1-79 > .kt-inside-inner-col:before{opacity:0.3;}.kadence-column17105_0564e1-79{position:relative;}@media all and (max-width: 1024px){.kadence-column17105_0564e1-79 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}@media all and (max-width: 767px){.kadence-column17105_0564e1-79 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}<\/style>\n<div class=\"wp-block-kadence-column kadence-column17105_0564e1-79\"><div class=\"kt-inside-inner-col\"><style>.wp-block-kadence-image.kb-image17105_71074e-6b:not(.kb-specificity-added):not(.kb-extra-specificity-added){margin-bottom:0px;}.kb-image17105_71074e-6b.kb-image-is-ratio-size, .kb-image17105_71074e-6b .kb-image-is-ratio-size{max-width:283px;width:100%;}.wp-block-kadence-column > .kt-inside-inner-col > .kb-image17105_71074e-6b.kb-image-is-ratio-size, .wp-block-kadence-column > .kt-inside-inner-col > .kb-image17105_71074e-6b .kb-image-is-ratio-size{align-self:unset;}.kb-image17105_71074e-6b figure{max-width:283px;}.kb-image17105_71074e-6b .image-is-svg, .kb-image17105_71074e-6b .image-is-svg img{width:100%;}.kb-image17105_71074e-6b:not(.kb-image-is-ratio-size) .kb-img, .kb-image17105_71074e-6b.kb-image-is-ratio-size{padding-bottom:0px;}.kb-image17105_71074e-6b .kb-image-has-overlay:after{opacity:0.3;}.kb-image17105_71074e-6b img.kb-img, .kb-image17105_71074e-6b .kb-img img{object-position:0% 0%;}<\/style>\n<div class=\"wp-block-kadence-image kb-image17105_71074e-6b\"><figure class=\"aligncenter size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"870\" height=\"630\" src=\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/01\/FLTZ.png\" alt=\"FLTZ chiller\" class=\"kb-img wp-image-11314\" srcset=\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/01\/FLTZ.png 870w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/01\/FLTZ-300x217.png 300w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/01\/FLTZ-768x556.png 768w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/01\/FLTZ-18x12.png 18w\" sizes=\"auto, (max-width: 870px) 100vw, 870px\" \/><\/figure><\/div>\n\n\n<style>.kadence-column17105_58c1d3-f3 > .kt-inside-inner-col{padding-top:var(--global-kb-spacing-md, 2rem);padding-right:var(--global-kb-spacing-md, 2rem);padding-bottom:var(--global-kb-spacing-md, 2rem);padding-left:var(--global-kb-spacing-md, 2rem);}.kadence-column17105_58c1d3-f3 > .kt-inside-inner-col,.kadence-column17105_58c1d3-f3 > .kt-inside-inner-col:before{border-top-left-radius:0px;border-top-right-radius:0px;border-bottom-right-radius:0px;border-bottom-left-radius:0px;}.kadence-column17105_58c1d3-f3 > .kt-inside-inner-col{column-gap:var(--global-kb-gap-sm, 1rem);}.kadence-column17105_58c1d3-f3 > .kt-inside-inner-col{flex-direction:column;}.kadence-column17105_58c1d3-f3 > .kt-inside-inner-col > .aligncenter{width:100%;}.kadence-column17105_58c1d3-f3 > .kt-inside-inner-col:before{opacity:0.3;}.kadence-column17105_58c1d3-f3{position:relative;}@media all and (max-width: 1024px){.kadence-column17105_58c1d3-f3 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}@media all and (max-width: 767px){.kadence-column17105_58c1d3-f3 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}<\/style>\n<div class=\"wp-block-kadence-column kadence-column17105_58c1d3-f3\"><div class=\"kt-inside-inner-col\"><style>.wp-block-kadence-advancedheading.kt-adv-heading17105_0d961c-c5, .wp-block-kadence-advancedheading.kt-adv-heading17105_0d961c-c5[data-kb-block=\"kb-adv-heading17105_0d961c-c5\"]{text-align:center;font-size:20px;font-weight:600;font-style:normal;font-family:Poppins;}.wp-block-kadence-advancedheading.kt-adv-heading17105_0d961c-c5 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_0d961c-c5[data-kb-block=\"kb-adv-heading17105_0d961c-c5\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_0d961c-c5 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_0d961c-c5[data-kb-block=\"kb-adv-heading17105_0d961c-c5\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading17105_0d961c-c5 wp-block-kadence-advancedheading has-themecolor-1-color has-text-color\" data-kb-block=\"kb-adv-heading17105_0d961c-c5\">LTZ 2\u2103~20\u2103<br>deionized water chiller<\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_ddf9d6-94, .wp-block-kadence-advancedheading.kt-adv-heading17105_ddf9d6-94[data-kb-block=\"kb-adv-heading17105_ddf9d6-94\"]{text-align:center;font-size:16px;font-weight:400;font-style:normal;font-family:Poppins;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading17105_ddf9d6-94 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_ddf9d6-94[data-kb-block=\"kb-adv-heading17105_ddf9d6-94\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_ddf9d6-94 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_ddf9d6-94[data-kb-block=\"kb-adv-heading17105_ddf9d6-94\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading17105_ddf9d6-94 wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading17105_ddf9d6-94\">Cooling capacity 5KW~25KW;<br>Temp accuracy \u00b10.5\u2103<\/p>\n<\/div><\/div>\n<\/div><\/div>\n<\/div><\/div>\n<\/div><a href=\"https:\/\/tw.lneya.com\/deionized-water-chillers\" class=\"kb-section-link-overlay\" target=\"_blank\" rel=\"noopener noreferrer\"><\/a><\/div>\n\n\n<style>.kadence-column17105_43b598-8a > .kt-inside-inner-col,.kadence-column17105_43b598-8a > .kt-inside-inner-col:before{border-top-left-radius:0px;border-top-right-radius:0px;border-bottom-right-radius:0px;border-bottom-left-radius:0px;}.kadence-column17105_43b598-8a > .kt-inside-inner-col{column-gap:var(--global-kb-gap-sm, 1rem);}.kadence-column17105_43b598-8a > .kt-inside-inner-col{flex-direction:column;}.kadence-column17105_43b598-8a > .kt-inside-inner-col > .aligncenter{width:100%;}.kadence-column17105_43b598-8a > .kt-inside-inner-col{background-color:var(--global-palette8, #F7FAFC);}.kadence-column17105_43b598-8a > .kt-inside-inner-col:before{opacity:0.3;}.kadence-column17105_43b598-8a{position:relative;}@media all and (max-width: 1024px){.kadence-column17105_43b598-8a > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}@media all and (max-width: 767px){.kadence-column17105_43b598-8a > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}<\/style>\n<div class=\"wp-block-kadence-column kadence-column17105_43b598-8a kb-section-has-link\"><div class=\"kt-inside-inner-col\"><style>.kadence-column17105_e04d59-38 > .kt-inside-inner-col,.kadence-column17105_e04d59-38 > .kt-inside-inner-col:before{border-top-left-radius:0px;border-top-right-radius:0px;border-bottom-right-radius:0px;border-bottom-left-radius:0px;}.kadence-column17105_e04d59-38 > .kt-inside-inner-col{column-gap:var(--global-kb-gap-sm, 1rem);}.kadence-column17105_e04d59-38 > .kt-inside-inner-col{flex-direction:column;}.kadence-column17105_e04d59-38 > .kt-inside-inner-col > .aligncenter{width:100%;}.kadence-column17105_e04d59-38 > .kt-inside-inner-col{background-color:var(--global-palette8, #F7FAFC);}.kadence-column17105_e04d59-38 > .kt-inside-inner-col:before{opacity:0.3;}.kadence-column17105_e04d59-38{position:relative;}@media all and (max-width: 1024px){.kadence-column17105_e04d59-38 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}@media all and (max-width: 767px){.kadence-column17105_e04d59-38 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}<\/style>\n<div class=\"wp-block-kadence-column kadence-column17105_e04d59-38\"><div class=\"kt-inside-inner-col\"><style>.kadence-column17105_802ec4-48 > .kt-inside-inner-col,.kadence-column17105_802ec4-48 > .kt-inside-inner-col:before{border-top-left-radius:0px;border-top-right-radius:0px;border-bottom-right-radius:0px;border-bottom-left-radius:0px;}.kadence-column17105_802ec4-48 > .kt-inside-inner-col{column-gap:var(--global-kb-gap-sm, 1rem);}.kadence-column17105_802ec4-48 > .kt-inside-inner-col{flex-direction:column;}.kadence-column17105_802ec4-48 > .kt-inside-inner-col > .aligncenter{width:100%;}.kadence-column17105_802ec4-48 > .kt-inside-inner-col{background-color:var(--global-palette8, #F7FAFC);}.kadence-column17105_802ec4-48 > .kt-inside-inner-col:before{opacity:0.3;}.kadence-column17105_802ec4-48{position:relative;}@media all and (max-width: 1024px){.kadence-column17105_802ec4-48 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}@media all and (max-width: 767px){.kadence-column17105_802ec4-48 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}<\/style>\n<div class=\"wp-block-kadence-column kadence-column17105_802ec4-48\"><div class=\"kt-inside-inner-col\"><style>.wp-block-kadence-image.kb-image17105_8d58e3-b5:not(.kb-specificity-added):not(.kb-extra-specificity-added){margin-bottom:0px;}.kb-image17105_8d58e3-b5.kb-image-is-ratio-size, .kb-image17105_8d58e3-b5 .kb-image-is-ratio-size{max-width:283px;width:100%;}.wp-block-kadence-column > .kt-inside-inner-col > .kb-image17105_8d58e3-b5.kb-image-is-ratio-size, .wp-block-kadence-column > .kt-inside-inner-col > .kb-image17105_8d58e3-b5 .kb-image-is-ratio-size{align-self:unset;}.kb-image17105_8d58e3-b5 figure{max-width:283px;}.kb-image17105_8d58e3-b5 .image-is-svg, .kb-image17105_8d58e3-b5 .image-is-svg img{width:100%;}.kb-image17105_8d58e3-b5:not(.kb-image-is-ratio-size) .kb-img, .kb-image17105_8d58e3-b5.kb-image-is-ratio-size{padding-bottom:0px;}.kb-image17105_8d58e3-b5 .kb-image-has-overlay:after{opacity:0.3;}.kb-image17105_8d58e3-b5 img.kb-img, .kb-image17105_8d58e3-b5 .kb-img img{object-position:0% 0%;}<\/style>\n<div class=\"wp-block-kadence-image kb-image17105_8d58e3-b5\"><figure class=\"aligncenter size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"870\" height=\"630\" src=\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/01\/\u53cc\u8def-1.png\" alt=\"lth chiller\" class=\"kb-img wp-image-11372\" srcset=\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/01\/\u53cc\u8def-1.png 870w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/01\/\u53cc\u8def-1-300x217.png 300w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/01\/\u53cc\u8def-1-768x556.png 768w, https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/01\/\u53cc\u8def-1-18x12.png 18w\" sizes=\"auto, (max-width: 870px) 100vw, 870px\" \/><\/figure><\/div>\n\n\n<style>.kadence-column17105_d4c5b2-01 > .kt-inside-inner-col{padding-top:var(--global-kb-spacing-md, 2rem);padding-right:var(--global-kb-spacing-md, 2rem);padding-bottom:var(--global-kb-spacing-md, 2rem);padding-left:var(--global-kb-spacing-md, 2rem);}.kadence-column17105_d4c5b2-01 > .kt-inside-inner-col,.kadence-column17105_d4c5b2-01 > .kt-inside-inner-col:before{border-top-left-radius:0px;border-top-right-radius:0px;border-bottom-right-radius:0px;border-bottom-left-radius:0px;}.kadence-column17105_d4c5b2-01 > .kt-inside-inner-col{column-gap:var(--global-kb-gap-sm, 1rem);}.kadence-column17105_d4c5b2-01 > .kt-inside-inner-col{flex-direction:column;}.kadence-column17105_d4c5b2-01 > .kt-inside-inner-col > .aligncenter{width:100%;}.kadence-column17105_d4c5b2-01 > .kt-inside-inner-col:before{opacity:0.3;}.kadence-column17105_d4c5b2-01{position:relative;}@media all and (max-width: 1024px){.kadence-column17105_d4c5b2-01 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}@media all and (max-width: 767px){.kadence-column17105_d4c5b2-01 > .kt-inside-inner-col{flex-direction:column;justify-content:center;}}<\/style>\n<div class=\"wp-block-kadence-column kadence-column17105_d4c5b2-01\"><div class=\"kt-inside-inner-col\"><style>.wp-block-kadence-advancedheading.kt-adv-heading17105_afc880-af, .wp-block-kadence-advancedheading.kt-adv-heading17105_afc880-af[data-kb-block=\"kb-adv-heading17105_afc880-af\"]{text-align:center;font-size:20px;font-weight:600;font-style:normal;font-family:Poppins;}.wp-block-kadence-advancedheading.kt-adv-heading17105_afc880-af mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_afc880-af[data-kb-block=\"kb-adv-heading17105_afc880-af\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_afc880-af img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_afc880-af[data-kb-block=\"kb-adv-heading17105_afc880-af\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading17105_afc880-af wp-block-kadence-advancedheading has-themecolor-1-color has-text-color\" data-kb-block=\"kb-adv-heading17105_afc880-af\">LTZ series<br>refrigeration chillers<\/p>\n\n\n<style>.wp-block-kadence-advancedheading.kt-adv-heading17105_116b29-32, .wp-block-kadence-advancedheading.kt-adv-heading17105_116b29-32[data-kb-block=\"kb-adv-heading17105_116b29-32\"]{text-align:center;font-size:16px;font-weight:400;font-style:normal;font-family:Poppins;color:#4a4a4a;}.wp-block-kadence-advancedheading.kt-adv-heading17105_116b29-32 mark.kt-highlight, .wp-block-kadence-advancedheading.kt-adv-heading17105_116b29-32[data-kb-block=\"kb-adv-heading17105_116b29-32\"] mark.kt-highlight{font-style:normal;color:#f76a0c;-webkit-box-decoration-break:clone;box-decoration-break:clone;padding-top:0px;padding-right:0px;padding-bottom:0px;padding-left:0px;}.wp-block-kadence-advancedheading.kt-adv-heading17105_116b29-32 img.kb-inline-image, .wp-block-kadence-advancedheading.kt-adv-heading17105_116b29-32[data-kb-block=\"kb-adv-heading17105_116b29-32\"] img.kb-inline-image{width:150px;vertical-align:baseline;}<\/style>\n<p class=\"kt-adv-heading17105_116b29-32 wp-block-kadence-advancedheading\" data-kb-block=\"kb-adv-heading17105_116b29-32\">Cooling capacity 0.7KW~155KW<br>Temp accuracy \u00b10.3\u2103<\/p>\n<\/div><\/div>\n<\/div><\/div>\n<\/div><\/div>\n<\/div><a href=\"https:\/\/tw.lneya.com\/refrigeration-chillers\" class=\"kb-section-link-overlay\" target=\"_blank\" rel=\"noopener noreferrer\"><\/a><\/div>\n\n<\/div><\/div><\/div><\/div>\n<\/div><\/div>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n\n\n\n<p class=\"wp-block-paragraph\"><\/p>\n","protected":false},"excerpt":{"rendered":"<p>Related Chillers LT -30\u2103~90\u2103recirculating chillers Cooling capacity 0.4KW~14KW;Temp accuracy \u00b10.5\u2103 FLTZ -100\u2103~90\u2103semiconductor chillers Cooling capacity 1KW~40KWTemp accuracy \u00b10.1\u2103 LG -115\u2103~-30\u2103screw chillers Cooling capacity9KW~936KW HLTZ -40\u2103~-30\u2103hydrogen chillers Cooling capacity 4.5KW~40KWTemp accuracy \u00b10.3\u2103 LTZ 2\u2103~20\u2103deionized water chiller Cooling capacity 5KW~25KW;Temp accuracy \u00b10.5\u2103 LTZ seriesrefrigeration chillers Cooling capacity 0.7KW~155KWTemp accuracy \u00b10.3\u2103<\/p>","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_kad_blocks_custom_css":"","_kad_blocks_head_custom_js":"","_kad_blocks_body_custom_js":"","_kad_blocks_footer_custom_js":"","themepark_post_bcolor":"#f5f5f5","themepark_post_width":"1022px","themepark_post_img":"","themepark_post_img_po":"left","themepark_post_img_re":false,"themepark_post_img_cover":false,"themepark_post_img_fixed":false,"themepark_post_hide_title":true,"themepark_post_main_b":"","themepark_post_main_p":100,"themepark_paddingblock":true,"footnotes":""},"categories":[326],"tags":[1386,1385,517],"class_list":["post-17105","post","type-post","status-publish","format-standard","hentry","category-blog","tag-lithography","tag-photolithography","tag-temperature-control"],"metadata":{"rank_math_internal_links_processed":["1","1","1","1"],"_kad_blocks_custom_css":[""],"_kad_blocks_head_custom_js":[""],"_kad_blocks_body_custom_js":[""],"_kad_blocks_footer_custom_js":[""],"themepark_post_bcolor":["#f5f5f5"],"themepark_post_width":["1022px"],"themepark_post_img":[""],"themepark_post_img_po":["left"],"themepark_post_img_re":[""],"themepark_post_img_cover":[""],"themepark_post_img_fixed":[""],"themepark_post_hide_title":["1"],"themepark_post_main_b":[""],"themepark_post_main_p":["100"],"themepark_paddingblock":["1"],"footnotes":[""],"catce":["procbl"],"_lwptoc_settings":["a:2:{s:7:\"enabled\";b:1;s:15:\"processHeadings\";b:1;}"],"_wp_old_slug":["ultimate-guide-to-chiller-fluids-water-glycol-oil-and-more"],"_wp_old_date":["2025-07-23"],"rank_math_primary_category":["326"],"rank_math_seo_score":["21"],"rank_math_og_content_image":["a:2:{s:5:\"check\";s:32:\"72df7b88725cdb550f7a2d747dc0c85c\";s:6:\"images\";a:1:{i:0;s:69:\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2024\/02\/wechat-QR-300x300.jpg\";}}"],"_dp_original":["16185"],"_edit_last":["1"],"themepark_seo_title":["Temperature Control in Photolithography"],"themepark_seo_description":["This article explains what photolithography is, why thermal stability matters, which tool elements need precise temperature, common control methods, how semiconductor chillers fit into the system."],"themepark_seo_keyword":["Photolithography,lithography,Temperature Control"],"_edit_lock":["1781158626:1"],"_headinfo":["a:1:{i:0;a:23:{s:6:\"module\";s:1:\"4\";s:7:\"navtext\";i:16;s:4:\"navb\";b:1;s:5:\"navpd\";i:23;s:5:\"navc1\";s:7:\"#014391\";s:5:\"navc2\";s:7:\"#0095d4\";s:5:\"navc4\";s:7:\"#fbfbfb\";s:5:\"navc5\";s:7:\"#ffffff\";s:5:\"navc6\";i:0;s:5:\"topc1\";s:7:\"#ffffff\";s:5:\"topc2\";s:7:\"#2ba8db\";s:4:\"topf\";i:12;s:6:\"seach1\";s:0:\"\";s:6:\"seach2\";s:0:\"\";s:3:\"sub\";i:209;s:8:\"searchbl\";i:5;s:6:\"navlib\";b:0;s:8:\"subhight\";i:550;s:8:\"submoshi\";s:0:\"\";s:9:\"navheight\";i:76;s:6:\"shadow\";i:0;s:5:\"sicon\";s:7:\"#014391\";s:7:\"search1\";s:7:\"#014391\";}}"],"_top_left_txt1":["a:1:{i:0;a:3:{s:4:\"text\";s:81:\"  Welcome to visit!  we\u2019ve built a culture of service, teamwork, and innovation\";s:3:\"url\";s:29:\"https:\/\/www.themepark.com.cn\/\";s:4:\"icon\";s:16:\"fab fa-wordpress\";}}"],"_top_left_txt2":["a:3:{i:0;a:3:{s:4:\"text\";s:9:\"DOWNLIOAD\";s:3:\"url\";s:0:\"\";s:4:\"icon\";s:28:\"fas fa-chevron-circle-right \";}i:1;a:3:{s:4:\"text\";s:3:\"FAQ\";s:3:\"url\";s:0:\"\";s:4:\"icon\";s:28:\"fas fa-chevron-circle-right \";}i:2;a:3:{s:4:\"text\";s:5:\"ABOUT\";s:3:\"url\";s:0:\"\";s:4:\"icon\";s:28:\"fas fa-chevron-circle-right \";}}"],"_icontext":["a:3:{i:0;a:5:{s:5:\"title\";s:18:\"\u514d\u8d39\u54a8\u8be2\u7535\u8bdd\";s:4:\"text\";s:12:\"400-123-4567\";s:3:\"url\";s:0:\"\";s:4:\"icon\";s:14:\"fas fa-headset\";s:5:\"color\";s:7:\"#2ba8db\";}i:1;a:5:{s:5:\"title\";s:12:\"\u8054\u7cfb\u6211\u4eec\";s:4:\"text\";s:12:\"198-999-4584\";s:3:\"url\";s:0:\"\";s:4:\"icon\";s:18:\"fas fa-paper-plane\";s:5:\"color\";s:7:\"#2ba8db\";}i:2;a:5:{s:5:\"title\";s:12:\"\u8d28\u91cf\u4fdd\u8bc1\";s:4:\"text\";s:18:\"\u5341\u5e74\u8d28\u4fdd\u8ba1\u5212\";s:3:\"url\";s:0:\"\";s:4:\"icon\";s:18:\"fa fa-pencil-ruler\";s:5:\"color\";s:7:\"#f1a433\";}}"],"_optop":["100"],"_dropbcolor":["#ffffff"],"_droptcolor":["#014391"],"_droptcolor2":["#0095d4"],"_logourl":["https:\/\/tw.lneya.com\/about-lneya"],"_headinfotop":[""],"_logoimg":["a:1:{i:0;a:36:{s:9:\"uploading\";b:0;s:4:\"date\";i:1766110822000;s:8:\"filename\";s:10:\"logo-4.png\";s:9:\"menuOrder\";i:0;s:10:\"uploadedTo\";i:17288;s:4:\"type\";s:5:\"image\";s:7:\"subtype\";s:3:\"png\";s:2:\"id\";i:17310;s:5:\"title\";s:4:\"logo\";s:3:\"url\";s:58:\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/12\/logo-4.png\";s:4:\"link\";s:41:\"https:\/\/tw.lneya.com\/?attachment_id=17310\";s:3:\"alt\";s:0:\"\";s:6:\"author\";s:1:\"1\";s:11:\"description\";s:0:\"\";s:7:\"caption\";s:0:\"\";s:4:\"name\";s:6:\"logo-6\";s:6:\"status\";s:7:\"inherit\";s:8:\"modified\";i:1766110822000;s:4:\"mime\";s:9:\"image\/png\";s:4:\"icon\";s:57:\"https:\/\/tw.lneya.com\/wp-includes\/images\/media\/default.svg\";s:13:\"dateFormatted\";s:17:\"2025\u5e7412\u670819\u65e5\";s:6:\"nonces\";a:3:{s:6:\"update\";s:10:\"b121fb2835\";s:6:\"delete\";s:10:\"ce6877bbce\";s:4:\"edit\";s:10:\"e8017917ef\";}s:8:\"editLink\";s:61:\"https:\/\/tw.lneya.com\/wp-admin\/post.php?post=17310&action=edit\";s:4:\"meta\";b:0;s:10:\"authorName\";s:12:\"lneyaadmindy\";s:10:\"authorLink\";s:41:\"https:\/\/tw.lneya.com\/wp-admin\/profile.php\";s:15:\"uploadedToTitle\";s:12:\"\u9876\u90e8\u5bfc\u822a\";s:14:\"uploadedToLink\";s:61:\"https:\/\/tw.lneya.com\/wp-admin\/post.php?post=17288&action=edit\";s:15:\"filesizeInBytes\";i:4198;s:21:\"filesizeHumanReadable\";s:4:\"4 KB\";s:7:\"context\";s:0:\"\";s:6:\"height\";i:100;s:5:\"width\";i:300;s:11:\"orientation\";s:9:\"landscape\";s:5:\"sizes\";a:3:{s:9:\"thumbnail\";a:4:{s:6:\"height\";i:100;s:5:\"width\";i:150;s:3:\"url\";s:66:\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/12\/logo-4-150x100.png\";s:11:\"orientation\";s:9:\"landscape\";}s:24:\"trp-custom-language-flag\";a:4:{s:6:\"height\";i:6;s:5:\"width\";i:18;s:3:\"url\";s:63:\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/12\/logo-4-18x6.png\";s:11:\"orientation\";s:9:\"landscape\";}s:4:\"full\";a:4:{s:3:\"url\";s:58:\"https:\/\/tw.lneya.com\/wp-content\/uploads\/2025\/12\/logo-4.png\";s:6:\"height\";i:100;s:5:\"width\";i:300;s:11:\"orientation\";s:9:\"landscape\";}}s:6:\"compat\";a:2:{s:4:\"item\";s:676:\"<input type=\"hidden\" name=\"attachments[17310][menu_order]\" value=\"0\" \/><p class=\"media-types media-types-required-info\"><span class=\"required-field-message\">\u5fc5\u586b\u9879\u5df2\u7528 <span class=\"required\">*<\/span> \u6807\u6ce8<\/span><\/p><table class=\"compat-attachment-fields\">\t\t<tr class='compat-field-imagify'>\t\t\t<th scope='row' class='label'><label for='attachments-17310-imagify'><span class='alignleft'>Imagify<\/span><br class='clear' \/><\/label><\/th>\n\t\t\t<td class='field'><div class=\"imagify-data-actions-container\" data-id=\"17310\" data-context=\"wp\">\n\t<div class=\"button button-imagify-processing\">\n\t<span class=\"imagify-spinner\"><\/span>\n\tOptimizing...<\/div><\/div><\/td>\n\t\t<\/tr>\n<\/table>\";s:4:\"meta\";s:0:\"\";}}}"],"views":["502"]},"taxonomy_info":{"category":[{"value":326,"label":"blog"}],"post_tag":[{"value":1386,"label":"lithography"},{"value":1385,"label":"Photolithography"},{"value":517,"label":"temperature control"}]},"featured_image_src_large":false,"author_info":{"display_name":"lneyaadmindy","author_link":"https:\/\/tw.lneya.com\/ru\/author\/lneyaadmindy"},"comment_info":0,"category_info":[{"term_id":326,"name":"blog","slug":"blog","term_group":0,"term_taxonomy_id":326,"taxonomy":"category","description":"","parent":0,"count":278,"filter":"raw","cat_ID":326,"category_count":278,"category_description":"","cat_name":"blog","category_nicename":"blog","category_parent":0}],"tag_info":[{"term_id":1386,"name":"lithography","slug":"lithography","term_group":0,"term_taxonomy_id":1386,"taxonomy":"post_tag","description":"","parent":0,"count":1,"filter":"raw"},{"term_id":1385,"name":"Photolithography","slug":"photolithography","term_group":0,"term_taxonomy_id":1385,"taxonomy":"post_tag","description":"","parent":0,"count":1,"filter":"raw"},{"term_id":517,"name":"temperature control","slug":"temperature-control","term_group":0,"term_taxonomy_id":517,"taxonomy":"post_tag","description":"","parent":0,"count":18,"filter":"raw"}],"medium_url":false,"thumbnail_url":false,"full_url":false,"_links":{"self":[{"href":"https:\/\/tw.lneya.com\/ru\/wp-json\/wp\/v2\/posts\/17105","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/tw.lneya.com\/ru\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/tw.lneya.com\/ru\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/tw.lneya.com\/ru\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/tw.lneya.com\/ru\/wp-json\/wp\/v2\/comments?post=17105"}],"version-history":[{"count":0,"href":"https:\/\/tw.lneya.com\/ru\/wp-json\/wp\/v2\/posts\/17105\/revisions"}],"wp:attachment":[{"href":"https:\/\/tw.lneya.com\/ru\/wp-json\/wp\/v2\/media?parent=17105"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/tw.lneya.com\/ru\/wp-json\/wp\/v2\/categories?post=17105"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/tw.lneya.com\/ru\/wp-json\/wp\/v2\/tags?post=17105"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}